Dynamic Process of Flow and Heat Transfer in Cz Furnace

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Recently, it is required to develop a new control system for the Czochralski crystal growth process based on the accurate knowledge of flow and heat transfer in the Cz furnace. Thus, we investigated experimentally and numerically flow and heat transfer in a cylindrical container with a rotating disk at the surface, and obtained the following results :1.The effects of the rotating speed of the container and the crystal on heat transfer coefficients at the walls of the container and at the crystal are found.2.The time variations of the heat transfer coeffficients with the oscillation of the crystal temperature are found.3.The effects of the amplitude and the frequecny of the oscillation of the crystal temperature on the heat transfer coefficients are obtained.Using the above results, we presented governing equations for the control system of the Czochralski crystal growth process. We calcultated the practical problems and obtained reasonable results.