Dynamic Process of Flow and Heat Transfer in Cz Furnace

直拉炉内流动与传热的动态过程

• 批准号: 07555546
• 负责人: OGINO Fumimaru
• 金额: $ 1.86万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555546/
• 关键词: Czochralski Method; Crystal Growth; Rotating Flow; Numerical Simulation

Recently, it is required to develop a new control system for the Czochralski crystal growth process based on the accurate knowledge of flow and heat transfer in the Cz furnace. Thus, we investigated experimentally and numerically flow and heat transfer in a cylindrical container with a rotating disk at the surface, and obtained the following results :1.The effects of the rotating speed of the container and the crystal on heat transfer coefficients at the walls of the container and at the crystal are found.2.The time variations of the heat transfer coeffficients with the oscillation of the crystal temperature are found.3.The effects of the amplitude and the frequecny of the oscillation of the crystal temperature on the heat transfer coefficients are obtained.Using the above results, we presented governing equations for the control system of the Czochralski crystal growth process. We calcultated the practical problems and obtained reasonable results.

近年来，人们迫切需要在准确掌握直拉法晶体生长炉内流动和传热规律的基础上，开发一种新的控制系统。因此，我们在实验和数值研究流动和传热的圆柱形容器与旋转盘在表面上，并获得了以下结果：1.得到了容器转速和晶体转速对容器壁面和晶体表面传热系数的影响规律; 2.得到了传热系数随晶体温度振荡的时间变化规律; 3.得到了晶体温度振荡幅度和频率对传热系数的影响规律。给出了直拉法晶体生长过程控制系统的控制方程。并对实际问题进行了计算，得到了合理的结果。

项目成果

F. Ogino: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 3. 30-1-1 - 30-1-6 (1993)

F. Ogino：“在液体表面具有固定固体圆柱体的旋转垂直圆柱形容器中的液体湍流”第九届湍流剪切流研讨会。

F.Ogino: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 3. 30-1-1-30-1-6 (1993)

F.Ogino：“在液体表面具有固定固体圆柱体的旋转垂直圆柱形容器中的液体湍流”第九届湍流剪切流研讨会。

F.Ogino: "Heat Transfer in Liquid in a Rotating Cyindrical Container with a Rotating Disc at the Liquid Surface" 2nd European Thermal-Sciences and 14th UIT National Heat Transfer Conference 1996. 827-834 (1996)

F.Ogino：“液体表面带有旋转盘的旋转圆柱形容器中的液体传热”，1996 年第二届欧洲热科学和第 14 届 UIT 全国传热会议。827-834 (1996)

F.Ogino, K.Kawai and K.Mayumi: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 30.1.1-30.1.6 (1993)

F.Ogino、K.Kawai 和 K.Mayumi：“液体表面具有固定固体圆柱体的旋转垂直圆柱形容器中的液体湍流”第九届湍流剪切流研讨会。

F.Ogino: "Heat Transfer in Liquid in a Cylindrical Container with a Rotating Disc at the Liquid Surface" Proc.the Tenth Int.Heat Transfer Confernce. 4. 303-308 (1994)

F.Ogino：“液体表面带有旋转盘的圆柱形容器中的液体传热”第十届国际传热会议论文集。