Formation of High Purity Glass Films for Planer Waveguide by Interfacial Polymerization

界面聚合法制备平面波导用高纯玻璃膜

• 批准号: 08455296
• 负责人: YAMANE Masayuki
• 金额: $ 4.93万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08455296/
• 关键词: Interfacial polymerization; Sol-gel method; Glass film; Waveguide

The formation of thick silicate glass film for a planer wavegide has been studied by an interfacial polymerization focusing on the conditions to reduce the sintering temperature of a gel film. The mechanism of gel film formation from ethylsilicate precursor at the existence of various kinds of catalyst was investigated in the first year. The nucleation and growth of silica particles comprising the film proceeded in the organic phase immediately above the interface, showing that a base catalyst having a high solubility such as triethylamine is effective. The size of particles comprising the film was, however, too large to be applied to a film formed on a silicon substrate, suggesting that the addition of boron or germanium was necessary to reduce the sintering temperature. The gel film formation from a precursor prepared from tetramthoxysilane and trimethylborate was investigated in the second year in order to reduce the sintering temperature of the film. A good reproducibility of composition and thickness was obtained for the gel formed using triethylamine as a catalyst. The film of SiO_2-B_2O_3 system was sintered to a pore free glass film at 1100ﾟC,which is low enough for the application to the planer waveguide on silicon substrate.

通过界面聚合研究了平面波导厚硅酸盐玻璃膜的形成，重点关注降低凝胶膜烧结温度的条件。第一年研究了在各种催化剂存在下硅酸乙酯前驱体形成凝胶膜的机理。包含膜的二氧化硅颗粒的成核和生长在界面正上方的有机相中进行，这表明具有高溶解度的碱催化剂如三乙胺是有效的。然而，构成该膜的颗粒的尺寸太大而无法应用于在硅衬底上形成的膜，这表明需要添加硼或锗来降低烧结温度。第二年研究了由四甲氧基硅烷和硼酸三甲酯制备的前体形成凝胶膜，以降低膜的烧结温度。使用三乙胺作为催化剂形成的凝胶获得了良好的组成和厚度再现性。将SiO_2-B_2O_3体系薄膜在1100℃下烧结成无孔玻璃薄膜,该温度足以应用于硅基平面波导。

项目成果

M.YAMANE: "Thick Silicate Film by an Interfacial Polymerization" J.Sol-Gel Science & Technology. 8. 483-87 (1997)

M.YAMANE：“通过界面聚合形成硅酸盐厚膜”J.Sol-Gel Science

H.Schulze-Bergkamen and M.Yamane: "Effects of Reaction Parameters on the Preparation of Thick Silica Gel Film by an Interfacial Polymerization,1.Effects of pH and Type of Catalyst" Journal of Sol-Gel Science and Technology. 5. 185-191 (1995)

H.Schulze-Bergkamen 和 M.Yamane：“反应参数对界面聚合制备厚硅胶膜的影响，1.pH 和催化剂类型的影响”《溶胶-凝胶科学与技术》杂志。

H.Schulge-Bergkamen and M.yamane: "Effects of Reaction Parameters on the Preparation of Thick Silica Gel Film by an Interfacial Polymerigation. 1.Effects of PH and Type of Catalyst" Journal of Sol-Gel Science and Technology. 5. 185-191 (1995)

H.Schulge-Bergkamen 和 M.yamane：“反应参数对界面聚合制备厚硅胶膜的影响。1.PH 和催化剂类型的影响”《溶胶-凝胶科学与技术》杂志。

H.Schulze-Bergkamen, S.Uchihiro and M.Yamane: "Formation of Thick Silicate Glass Film on Silica Glass Substrate by an Interfacial Polymerization" Adranced Materials in Optics and Communication Technology. 63-71 (1995)

H.Schulze-Bergkamen、S.Uchihiro 和 M.Yamane：“通过界面聚合在二氧化硅玻璃基板上形成厚硅酸盐玻璃膜”光学和通信技术中的先进材料。

M.Yamane, M.Iwasaki and S.Itoh: "Thick Film Coating by Gels" Ceramic Transactions. (in press).

M.Yamane、M.Iwasaki 和 S.Itoh：“凝胶厚膜涂层”陶瓷交易。