A Basic Study on a Micro Sensor/Actuator with Equivalent Structure of Human Basilar Membrane

在本计画中，我们的目标是发展一种具有鱼骨结构的微感测器/致动器，其是一种人体基底膜的等效系统。我们的具体目标是a）用于语音识别的智能麦克风，B）具有自适应频率特性的助听器。智能麦克风鱼骨结构的优化设计作为鱼骨结构的优化设计，我们导出了“完美对数线性结构”，其中1）谐振器的电阻元件是常数，2）电感、电容元件是对数线性排列。提出了一种新的声信号特征提取方法建立了从鱼骨图输出信号中提取AM/FM/基音成分的理论.利用硅微机械加工实现鱼骨结构利用住友金属的工艺设计并制作了鱼骨结构，并通过实验验证了其特性.鱼骨传感器的应用利用鱼骨传感器，我们实现了1）一种频率特性可控的微型助听器声学传感器，2）一种仿生结构的声源定位传感器。

In this project, we aim to develop a micro sensor/actuator with fishbone structure, which is a equivalent system of the human basilar membrane. Our specific targets are a) intelligence microphone for speech recognition, b) hearing aids with adaptive frequency charateristics.The summary of the results of this project is as follows:1. Derivation of an optimum fishbone structure as an intelligence microphoneAs an optimal design of fishbone, we derived "perfect log-linear structure" , in which1) resistive elements of resonators are constant,2) inductive, capacitive elements are arrayd on a log-linear.2. Proposition of a new feature extraction for acoustic signalsWe constructed a theory to extract AM/FM/pitch componets from output signals of fishbone.3. Implementation of fishbone by Si micro-machiningBy a process in Sumitomo Metal Industries, we designed and fabricated fishbone structure and confirmed its characteristics by experimets.4. Applications of fishbone sensorsWith using fishbone sensors, we realized1) an acoustic sensor with controllable frequency characteristics for micro hearing aids,2) a sound source localization sensor with bio-mimicry structure.