A Basic Study on New-Generation Pattern Measurement Methods Based on Time-Domain Correlation Image Sensors

点击翻译按钮获取中文摘要

In this project, we have developed time-domain correlation image sensors, which output temporal correlation between the incident light intensity and the external global signal at each pixels, and have applied them to new pattern measurement methods.The summary of the results of this project is as follows :Fabrication and Evaluation of Time-Domain Correlation Image Sensor DevicesOn CMOS processes of the VDEC in University of Tokyo, we designed and fabricated the following devices, and confirmed their characteristics by experiments.1. 64 x 64 pixels time-domain correlation image sensor2. time-domain correlation PSD (Position-Sensitive Detector)3. 16 x 16 pixels full-digital time-domain correlation image sensor4. 32 x 32 pixels tri-phase time-domain correlation image sensorProposition of New Optical Measurement Methods Using Time-Domain Correlation Image SensorBy using time-domain correlation sensors, we proposed novel optical measurement methods as follows :1. Electro-optical vivrometry2. Real-time Range Finder3. Image Local Log-Polar Analysis4. Spectral Matching Imager