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Development of the Correlation Image Sensor and its application to innovative pattern measurement technique

相关图像传感器的开发及其在创新图案测量技术中的应用

基本信息

批准号：
17360189
负责人：
ANDO Shigeru
金额：
$ 10.69万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360189/
关键词：
Correlation Image Sensor CMOS Image Sensing Optical Measurement Heterodyne CMOS Image Sensor Lock-in Camera イメージセンサ相関計測光通信位置姿勢計測白色干渉

项目摘要

By this research, we could accomplished steady growth on the performance improvement of the correlation image sensor device and several applications of it to scientific and in dustrial measurements.In the device issue, we designed a high-performance integrated sensor based on the fundamental theoretical and. experimental analysis. We fabricated the sensor under collaboration with Japanese famous company using the 0.35um CMOS imager process and several IP elements developed by the company. Also, we could realize multi-channel color device for advanced applications of the correlation image sensor.In the application issue, we developed novel measurement technologies for scientific and industrial applications. The key issues of the development is : 1) the use of amplitude and phase detection capability by the three-phase device, 2) conversion of various non-optical quantities to optical intensity distribution by means of physical effects such as Faraday effect, Kerr effect, Doppler effect, etc. 3) extention of range of wave length particularly into near infrared zone. We developed the magneto-optic leakage flux imager, optical heterodyne imager of nano-scale 3D profile and vibration distribution, realtime imaging ellipsometry, realtime maximum spatio-temporal resolution optical flow sensor, realtime white-light interferometer for 3D profiling and vibration measurement. We are also developing the spectral matching imager in wide wavelength range collaborating with the Hamamatsu optronics cluster project.

通过这项研究，我们可以实现相关图像传感器器件性能的稳步提高以及其在科学和工业测量中的多种应用。在器件问题上，我们在基础理论和基础上设计了一种高性能集成传感器。实验分析。我们与日本著名公司合作制造了该传感器，采用0.35um CMOS成像器工艺和该公司开发的多个IP元件。此外，我们还可以实现多通道彩色器件，以实现相关图像传感器的高级应用。在应用问题中，我们开发了适用于科学和工业应用的新颖测量技术。开发的关键问题是：1）利用三相装置的幅度和相位检测能力，2）通过法拉第效应、克尔效应、多普勒效应等物理效应将各种非光学量转换为光强度分布。3）波长范围特别是近红外区域的扩展。我们开发了磁光漏磁通成像仪、纳米级3D轮廓和振动分布的光学外差成像仪、实时成像椭偏仪、实时最大时空分辨率光流传感器、用于3D轮廓和振动测量的实时白光干涉仪。我们还与滨松光电集群项目合作开发宽波长范围的光谱匹配成像仪。