PREPARATION OF HIGHLY SENSITIVE AND STABLE GAS SENSING FILM BY USING HYDROTHERMALLY TREATED SEMICONDUCTING OXIDE COLLOIDAL PARTICLE

薄膜半导体气体传感器已成为一个密集的研究目标，使其能够独立地推进其敏感性高、制造成本低和微传感器的适用性。哦，还有很多尝试来制造薄膜传感器，但没有一个是商业上可用的。它似乎是一个瘦电影设备的关键重要性，如何使瘦电影成为一个制造统一的，并在传感器操作期间保持稳定。This study aims at establishing or evaluating hydrothermal treatment condition for SnOイイD22エD2 sol solutions， thermal growth behavior of SnOイD22エD2 grains （crystallites） at elevated temper\and gas sensing properties of the resulting this film device. 1。SnO D22 sol by a hydrothermal treatment and grain growth behavior of hydrothermally treated SnO D22 D2A Hydrothermal treatment of-stannic acid gel in ammonia water gives to a solution dispersing nanoparticle of SnO D22 with a narrow particle ... More ze distribution （5 - 7nm）。In addition， the SnOイイD22エD2 powder derived from the sol solution is very resistant to grain growth at evaluated temperature。这一指标表明，水晶石的热增长被低估了与水热治疗相矛盾。该抑制被认为是以减少SnO-D22-D2含量的溶液，几乎饱和于1.8重量%的溶液含量。正如所看到的，在此内容中，水晶石尺寸在900 ° C 2的计算后可能小于13纳米。Gas sensing properties of thin film devices prepared from hydrothermally treated sol solutionsThis film SnO D22 sensors were prepared from the hydrothermally treated sol solutions by a spin-coating method。此电影设备提供了较高的敏感性和快速响应瞬态与传统的交错块类型匹配。这些影响是预期的，可以从气体传感层的厚度中减少，而颗粒大小较小。它被发现是由于电影紧张度的增加而减少了H-D22的敏感性。“CO敏感性，在另一只手上，已经找到了几乎独立于电影的厚度。”It seems that the observed difference in the thickness dependence reflManagement the difference in gas diffusion properties between H-D22-D2 and CO through the Oracle pores of the film。Less（低）

Thin film semiconductor gas sensors have been an intensive research target owing to their indispensable advantages such as high sensitivity, low fabrication cost and applicability for microsensors. Although there have been many attempts to fabricate thin-film sensors, none of them have been commercially available yet. It seems to be of key importance for a thin film device how the thin film can be fabricated uniform and kept stable during sensor operation. This study aims at establishing or evaluating hydrothermal treatment condition for SnOィイD22ィエD2 sol solutions, thermal growth behavior of SnOィイD22ィエD2 grains (crystallites) at elevated temperatures and gas sensing properties of the resulting this film device.1. Preparation of SnOィイD22ィエD2 sol by a hydrothermal treatment and grain growth behavior of hydrothermally treated SnOィイD22ィエD2A Hydrothermal treatment of α-stannic acid gel in ammonia water gives to a sol solution dispersing nanoparticle of SnOィイD22ィエD2 with a narrow particle si … More ze distribution (5 -7 nm). In addition, the SnOィイD22ィエD2 powder derived from the sol solution is very resistant to grain growth at evaluated temperature. This indicates that the thermal growth of crystallites is suppressed remarkably with the hydrothermal treatment. The suppression was more pronounced with decreasing SnOィイD22ィエD2 content of the sol solution, almost saturating at 1.8wt% sol content. It is seen that, at this content, crystallite size can be small as 13 nm after calcination at 900℃2. Gas sensing properties of thin film devices prepared from hydrothermally treated sol solutionsThis film SnOィイD22ィエD2 sensors were prepared from the hydrothermally treated sol solutions by a spin-coating method. This film devices proved higher sensitivity and quicker response transients compared with the conventional sintered-block type ones. These effects are expected to arise from a reduction in gas sensing layer thickness as well as smaller grain size. It was found that the HィイD22ィエD2 sensitivity decreased with an increase in film thickness. The CO sensitivity, on the other hand, was found to be almost independent on the film thickness. It seems that the observed difference in the thickness dependence reflects the difference in gas diffusion properties between HィイD22ィエD2 and CO through the micro pores of the film. Less