リアルタイム分子膜厚分布計測装置の開発

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A real-time measurement system of molecular film thickness using a phase-shifting technique is proposed. In order to observe the molecular films accurately, the following conditions have been required in this system :1. An image data must be non-compression data.2. A-D conversion cannot be contained in the image processing.3. An electric noise cannot be ignored.4. An accurate heat transfer control is required.To realize this system, a digital phase-shifting camera has been developed. It has three digital Charge Coupled Device (CCD) sensors and high precision polarizer. Furthermore, a new digital recorder has been developed in order to take high-resolution image data. This recorder can take images as a 10 bit data without compression process, and can record 60 image data per a second. Combining both digital camera and recorder system, more accurate capturing system is accomplished.A principle of phase-shifting ellipsometry is derived using both phase-shifting technique and conventional principle of ellipsometry. A test cell for observation of condensed surface has been developed based on this principle. A Peltier element is used for cooling to make condensed surface. And peltier- thermistor controler is developed to operate this test cell ; as a result, active and accurate heat transfer control can be achieved. A condensed surface was observed using this measurement system.