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リアルタイム分子膜厚分布計測装置の開発

实时分子膜厚度分布测量装置的研制

基本信息

批准号：
10555064
负责人：
MARUYAMA Shigenao
金额：
$ 8.32万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555064/
关键词：
Interferometer Phase-shifting film thickness phase change ellipsometry

项目摘要

A real-time measurement system of molecular film thickness using a phase-shifting technique is proposed. In order to observe the molecular films accurately, the following conditions have been required in this system :1. An image data must be non-compression data.2. A-D conversion cannot be contained in the image processing.3. An electric noise cannot be ignored.4. An accurate heat transfer control is required.To realize this system, a digital phase-shifting camera has been developed. It has three digital Charge Coupled Device (CCD) sensors and high precision polarizer. Furthermore, a new digital recorder has been developed in order to take high-resolution image data. This recorder can take images as a 10 bit data without compression process, and can record 60 image data per a second. Combining both digital camera and recorder system, more accurate capturing system is accomplished.A principle of phase-shifting ellipsometry is derived using both phase-shifting technique and conventional principle of ellipsometry. A test cell for observation of condensed surface has been developed based on this principle. A Peltier element is used for cooling to make condensed surface. And peltier- thermistor controler is developed to operate this test cell ; as a result, active and accurate heat transfer control can be achieved. A condensed surface was observed using this measurement system.

提出了一种基于相移技术的分子膜厚度实时测量系统。为了准确地观察分子膜，本系统需要满足以下条件：1.图像数据必须是非压缩数据。A-D转换不能包含在图像处理中。电噪声是不能忽视的。为了实现这一系统，研制了一种数字相移相机。它有三个数字电荷耦合器件(CCD)传感器和高精度的偏振器。此外，为了获取高分辨率的图像数据，还开发了一种新的数字记录器。该记录器可以将图像作为10位数据而无需压缩处理，并且每秒可以记录60个图像数据。将数码相机和记录系统相结合，实现了更精确的采集系统。利用相移技术和传统的椭圆偏振测量原理，推导出了相移椭圆偏振测量原理。基于这一原理，研制了凝聚面观测试验台。Peltier单元用于冷却以形成凝聚表面。并开发了Peltier-热敏电阻控制器来操作该试验室，从而实现了主动、精确的热传递控制。利用该测量系统观察到了凝聚面。