RESEARCH ON INNER COATING METHOD OF NARROW TUBE BY MIRROR-TYPE COAXIAL ECR PLASMAS

镜式同轴ECR等离子体窄管内涂层方法研究

• 批准号: 10558066
• 负责人: FUJIYAMA Hiroshi
• 金额: $ 4.22万
• 依托单位: NAGASAKI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10558066/
• 关键词: ECR PLASMA; MIRROR MAGNETIC FIELD; SPUTTERING; NARROW TUBE COATING; INNER COATING; プラズマプロセス; 反応性スパッタリング; 機能性薄膜; PVD

COAXIAL ELECTRON CYCLOTRON RESONANCE PLASMAS WITH MIRROR-TYPE MAGNETIC FIELD HAVE BEEN DEVELOPED TO GENERATE AND TRANSPORT OF HIGH DENSITY PLASMAS IN MILIMETER-SIZE NARROW TUBE FOR LOW PRESSURE AND NARROW-GAP CONDITIONS.MIRROR-TYPE MAGNETIC FIELD CAN DECREASE AN ELECTRON LOSS IN THE AXIAL DIRECTION.BY AXIAL SCANNING OF THE MIRROR-TYPE MAGNETIC FIELD, IT HAS BEEN REALIZED THE SPUTTER COATING OF INSIDE WALL OF NARROW TUBES.MAIN RESULTS OF THE ARE SUMMRIZED AS FOLLOWS ;1) GENERATION POINTS OF ECR PLASMA STRONGLY DEPENDS ON THE GAS PRESSURE.IN THE LOW PRESSURE CONDITION, ECR PLASMA COULD BE GENERATED 2 METER AWAY FROM A MICROWAVE INJECTION WINDOW.2) STABLE PLASMA GENERATION WAS REALIZED AT THE LOW PRESSURE CONDITIONS BY USING MIRROR-TYPE MAGNETIC FIELD.3) IT WAS SUCCESSFULLY PERFORMED TITANIUUM INNER COATING OF METALLIC TUBE WITH 27MM IN INNER DIAMETER AND 2 M IN LENGTH.4) INNER COATINGS OF BOTH GLASS AND FERROMAGNETIC TUBES WERE ALSO REALIZED BY THIS METHOD.

同轴电子回旋共振等离子体是一种具有镜面磁场的等离子体，可以在毫米级的窄管中产生和输运高密度等离子体。镜面磁场可以减少轴向的电子损失。利用镜面磁场的轴向扫描，实现了窄管内壁的溅射涂层。主要研究结果总结如下：1) ecr等离子体的产生点强烈依赖于气体压力。2)在低压条件下，利用镜面磁场实现了稳定的等离子体生成，3)成功地对内径27mm、长度2m的金属管进行了钛内涂覆，4)还实现了玻璃管和铁磁管的内涂覆。

项目成果

藤山 寛: "マイクロプラズマによる細管内面コーティング"プラズマ・核融合学会誌. 76. 465-470 (2000)

Hiroshi Fujiyama：“用微等离子体涂覆小管的内表面”日本等离子体与核聚变学会杂志 76. 465-470 (2000)。

T.Nagano and H.Fujiyama: "Characteristics of Scanning Mirror-type Magnetic Field Coaxial Electron Cylotron Resonanie for PlasmaInner Coating of Slender Glass Tubes"Jpn.J.Appl.Phys.. 38. 4338-4341 (1999)

T.Nagano 和 H.Fujiyama：“用于细长玻璃管等离子内涂层的扫描镜型磁场同轴电子回旋共振的特性”Jpn.J.Appl.Phys.. 38. 4338-4341 (1999)

E.Morisaki, T.Nagano and H.Fujiyama: "Characteristics of Scanning Magnetic Field-Type Coaxial ECR Plasma for Inner Coating of Slender Tubes"Electrical Engineering in Japan. Vol.130. 18-23 (2000)

E.Morisaki、T.Nagano 和 H.Fujiyama：“用于细长管内涂层的扫描磁场型同轴 ECR 等离子体的特性”日本电气工程。

E.Morisaki, T.Nagano. H.Fujiyama: "Characteristics of Scanning Magnetic Field-type Coaxial ECR Plasma for Inner Coating of Slender Tubes"Electrical Engineering in Japan. 130. 18-23 (2000)

E.森崎，T.长野。

H.Fujiyama: "Inner Coating of Long Narrow Tube by Plasma Sputtering"Surface and Coatings Technology. 131. 278-283 (2000)

H.Fujiyama：“等离子溅射长窄管内涂层”表面和涂层技术。