RESEARCH ON INNER COATING METHOD OF NARROW TUBE BY MIRROR-TYPE COAXIAL ECR PLASMAS

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COAXIAL ELECTRON CYCLOTRON RESONANCE PLASMAS WITH MIRROR-TYPE MAGNETIC FIELD HAVE BEEN DEVELOPED TO GENERATE AND TRANSPORT OF HIGH DENSITY PLASMAS IN MILIMETER-SIZE NARROW TUBE FOR LOW PRESSURE AND NARROW-GAP CONDITIONS.MIRROR-TYPE MAGNETIC FIELD CAN DECREASE AN ELECTRON LOSS IN THE AXIAL DIRECTION.BY AXIAL SCANNING OF THE MIRROR-TYPE MAGNETIC FIELD, IT HAS BEEN REALIZED THE SPUTTER COATING OF INSIDE WALL OF NARROW TUBES.MAIN RESULTS OF THE ARE SUMMRIZED AS FOLLOWS ;1) GENERATION POINTS OF ECR PLASMA STRONGLY DEPENDS ON THE GAS PRESSURE.IN THE LOW PRESSURE CONDITION, ECR PLASMA COULD BE GENERATED 2 METER AWAY FROM A MICROWAVE INJECTION WINDOW.2) STABLE PLASMA GENERATION WAS REALIZED AT THE LOW PRESSURE CONDITIONS BY USING MIRROR-TYPE MAGNETIC FIELD.3) IT WAS SUCCESSFULLY PERFORMED TITANIUUM INNER COATING OF METALLIC TUBE WITH 27MM IN INNER DIAMETER AND 2 M IN LENGTH.4) INNER COATINGS OF BOTH GLASS AND FERROMAGNETIC TUBES WERE ALSO REALIZED BY THIS METHOD.