Study on High-Integrated Three-Dimensional Micro Motion Convert Mechanisms

对于传统的微型机械，特别是微动转换机构，当输入点沿同一方向移动时，机构的输出点可以水平移动。因此，我们提出了一种三维运动转换机构，当输入点沿水平方向运动时，输出点可以垂直运动。该机构由静电梳齿驱动机构和大偏转弹性铰链机构组成。本研究从理论和实验两个方面研究了该机制的有效性和特点。在此基础上，利用微机械加工技术制作了机构和执行器。研究结果如下：(1)在机构数字综合的基础上，引入了两自由度五杆PRRRRP机构，并采用大偏转弹性铰链代替机构中的回转副，提出了一种用于提取…输入运动的三维微动转换机构此外，还提出了基片平面作为输出指向平面外的运动。并提出将静电梳齿驱动器与运动转换机构统一配置。(2)针对运动转换机构，建立了基于大挠度弯曲理论的理论分析方程。并结合运动转换机构的宏模型，进行了理论分析和实验分析。理论分析表明，输入和输出位移之间的关系分别受铰链尺寸和杆件厚度与杆长之比的影响。(4)介绍了以聚酰亚胺为结构材料的微机械加工模型的制作过程，并制作了利用上述理论设计的几个原型。(5)为了考虑制作具有运动转换机构的均匀设计的驱动器，我们决定用聚酰亚胺制作静电梳齿驱动器，并提出了在表面沉积金属使驱动器能够静电驱动的技术。然后，使用所制造的执行器进行实验，将施加的电压设置为80V，此时的输出位移约为15.75微米。较少

For conventional micromachines, in particular, micromotion convert mechanisms, the output points of the mechanism can move horizontally when input points move in the same direction. Therefore we proposed a three-dimensional motion convert mechanism whose output points can move vertically when the input points move in the horizontal direction. This mechanism consists of electrostatic comb-drive actuators and a mechanism with large-deflective elastic hinges. In this study, the validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally. Then the mechanisms and actuators are manufactured by micromachinig technology. The results obtained from this study are as follows.(1) By introducing the 2-DOF 5-link PRRRRP mechanism based on the number synthesis of the mechanisms and by adopting large deflective elastic hinges instead of the revolute pair in the mechanism, a three-dimensional micro motion convert mechanism to take out the input motion in … More a substrate plane as the output motion directed to the outside of the plane was proposed. And, electrostatic comb-drive actuators uniformly deviced with the motion convert mechanisms are proposed too.(2) With the motion convert mechanism, a theoretical analysis equation based on the large deflective bending theory was introduced. Furthermore with a macromodel of the motion convert mechanism, theoretical analysis and experimental analysis were made. Thus propriety of the theoretical equation was confirmed.(3) It is clarified from the theoretical analysis that the relationship between input and output displacements are affected by the dimensions of the hinges and the ratio of the thickness of the link to the length of it independently. And, the ratio is the prime factor for the characteristics about the input and output forces.(4) The fabrication process for a model fabricated by using micromachinig technologies and polyimide as the structural material is introduced and several prototypes designed by using the above theory are manufactured.(5) To consider making an actuator uniformly devised with a motion convert mechanism, we decided to make an electrostatic comb-drive actuator using polyimide, and then, we also proposed the technique, in which depositing metals onto the surface can make it possible for an actuator to drive electrostatically. Then, conducting experiments using manufactured actuators, the applied voltage is set at 80V, while the output displacement at this time is about 15.75 micro-meters. Less