Construction and Control of Ultra-precision Positioning System Driven by Leadscrew Mechanism Applied Elastic Functional Element

丝杠机构应用弹性功能元件驱动超精密定位系统的构建与控制

• 批准号: 10650257
• 负责人: FUKADA Shigeo
• 金额: $ 2.24万
• 依托单位: Shinshu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650257/
• 关键词: Positioning; Leadscrew; Ultra-precision

This study proposes a simple method that will give extreme improvements in positioning performance of leadscrew mechanism. The method is achieved by intentionally attaching a linear elastic element to a sliding leadscrew. This study aims at investigating propriety and availability of the proposed method, and at considering control method proper to the new mechanism. A positioning system is constructed to be attached the elastic element, while design procedure of the elastic element is considered to manufacture the element practically. Moreover, the property of the developed system and control method is discussed.A positioning stage with stroke of 200 mm is newly developed. The stage is driven by a sliding leadscrew rotated by a DC servo motor of 130 W, and the motor is driven by a linear current amplifier. The table displacement is detected by a laser interferometer. A special arrangement of optical elements is introduced using a three-sided mirror set on the table to reflect the laser … More beam from the interferometer. The optical arrangement makes it possible to measure the table displacement without any influence of Abbe's error. The design method of the elastic element is shown using a cylinder with flexure hinges formed by notching. Three elastic elements with different stiffness are made practically.The stiffness of the manufactured elements are measured and compared to the design specifications. The actual stiffness is smaller than the calculation. Some experiments are performed on the developed positioning system to investigate its performance. The relation between the torque input and the table displacement shows quite linear characteristics in microscopic range, so that the availability of the method is proved. The stage is controlled by a software servo system. The controller is designed based on PI operation, and the parameters are given in coarse, fine and ultra-fine range respectively. It is ascertained that the positioning resolution of the system is 5 nm, and that the error of 20 mm step positioning is less than 6 nm. Less

这项研究提出了一种简单的方法，将极大地提高丝杠机构的定位性能。该方法是通过故意将线弹性元件连接到滑动丝杠上来实现的。本研究旨在探讨该方法的适当性和有效性，并考虑适合新机制的控制方法。构造了一个安装在弹性元件上的定位系统，同时考虑了弹性元件的设计步骤，以便实际制造该元件。并对系统的性能和控制方法进行了讨论。研制了行程为200 mm的定位工作台。工作台由130W直流伺服电机旋转的滑动丝杠驱动，电机由线性电流放大器驱动。工作台位移由激光干涉仪检测。介绍了一种特殊的光学元件布置，使用设置在工作台上的三面镜来反射激光…更多来自干涉仪的光束。光学装置使测量工作台位移成为可能，而不受阿贝误差的任何影响。文中以圆柱体为例，给出了弹性元件的设计方法，其中圆柱体通过切槽形成柔性铰。实际制作了三种不同刚度的弹性元件，并对制造出的元件进行了刚度测试，并与设计规范进行了比较。实际刚度小于计算值。在所开发的定位系统上进行了一些实验，以考察其性能。在微观范围内，力矩输入与工作台位移之间呈现出较好的线性关系，从而证明了该方法的有效性。工作台由软件伺服系统控制。该控制器是基于PI运算设计的，分别给出了粗、细、超细范围内的参数。结果表明，该系统的定位分辨率为5 nm，20 mm步进定位误差小于6 nm。较少

项目成果

Shigeo FUKADA: "Ultra-precision Positioning with Nanometric Resolution Using Leadscrew Mechanism"Proc. 0 of the 1st International euspen Conference. 56-59 (1999)

Shigeo FUKADA：“使用导螺杆机构实现纳米级分辨率的超精密定位”Proc。

Shigeo Fukada: "Ultra-precision Positioning with Nanometric Resolution Using Leadscrew Mechanism"Proceedings of the 1st International euspen Conference. Vol.1. 56-59 (1999)

Shigeo Fukada：“利用丝杠机构实现纳米级分辨率的超精密定位”第一届国际 euspen 会议论文集。

深田茂生: "弾性変換機能を付加した送りねじ機構による超精密位置決め" 1998年度精密工学会秋季大会学術講演会講演論文集. 471 (1998)

深田繁雄：《利用具有弹性转换功能的进给丝杠机构的超精密定位》1998年日本精密工程学会秋季会议学术会议论文集471（1998）。

陶 夏: "弾性変形要素を付加したすべり送りねじによる超精密位置決め(静・動摩擦特性のモデル実験)"日本機械学会北陸信越支部第36期総会講演会講演論文集. 221-222 (1999)

夏苏：《使用附加弹性变形元件的滑动进给丝杠的超精密定位（静、动摩擦特性的模型实验）》日本机械工程学会北陆信越分会第36届会员大会论文集。 221-222（1999）

陶夏,深田茂生,賀勢晋司: "弾性変形要素を付加したすべり送りねじによる超精密位置決め" 日本機械学会北陸信越支部代36期総会・講演会. 発表予定. (1999)

Sueka、Shigeo Fukada、Shinji Kase：“使用添加弹性变形元件的滑动进给丝杠进行超精密定位”第 36 届日本机械工程师学会北陆信越分会大会暨演讲（1999 年）。