Fabrication and control of ultra-precision positioning mechanism over one-millimeter stroke by using flexure guide and electromagnetic actuator

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In this study, an ultra-precision positioning mechanism with one-millimeter stroke, i.e. maximum stroke of 1×1 mm in X×Y, was fabricated by using an integrated monolithic flexure guide mechanism and electromagnetic linear motors, and its control system was constructed. Consequently, fine positioning resolution of 2 nm in PTP positioning motion and superior CP positioning performance with roundness error less than 10.5 nm and radial error of 2 nm (RMS value) in continuous circular motion with 1 mm diameter was achieved. Therefore, an ultra-precision positioning system with nanometer-level resolution and accuracy over one-millimeter stroke was realized.