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Photosensitivity Mechanism of Chemically Modified Gel Films and Their Application to the Fabrication of Micro-Devices

化学修饰凝胶薄膜的光敏机理及其在微器件制备中的应用

基本信息

批准号：
11650866
负责人：
TOHGE Noboru
金额：
$ 2.3万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

The current research project has been carried out to study the mechanism of photosensitivity of chemically modified gel films and apply them to the fabrication of microdevices. The following results have been obtained.1) Preparation and patterning conditions of a variety of photosensitive gel films such as Nb_2O_5, ZrO_2-SiO_2, PZT and PLZT, which are essential materials for optical and electronic devices, have been established and the resultant oxide films have been characterized.2) Chemical modification of Si-alkoxides with phenanthroline or the use of tri-functional alkoxides with a methacryl group has been found to give photosensitive SiO_2 gel films.3) The preparation process has been examined to fabricate Bragg diffraction gratings using photosensitive ZrO_2, PZT and PLZT gel films by the phase mask and two-beam-interference methods and the gratings obtained have been characterized in terms of preparation conditions.4) Double exposure of gel films to two-beam-interference fringes gave two-dimensional gratings of lattice and island types depending on the irradiation energy of laser.5) Simultaneous chemical modification of Ti-alkoxide with β-diketone and methacrylic acid brought about an increase in both photosensitivity and resolution of the resultant gel films.6) Molecular orbital calculation of electronic state of metal-alkoxides chemically modified with various β-diketones gave optical absorption spectra, which were in good agreement with the experimental ones.7) Double layer type of photocatalyst where patterned TiO_2 film is deposited on a SnO_2-coated glass substrate has been proposed and this new type of photocatalyst has been shown to be highly active for the acquisition of hydrogen from methanol, as well as the decomposition of harmful organic compounds.

本研究旨在探讨化学改性凝胶薄膜的光敏机理，并将其应用于微器件的制作。1）Nb_2O_5、ZrO_2-SiO_2、PZT、PLZT等光电子器件的光敏凝胶薄膜的制备及图形化条件; 2）用邻菲咯啉或使用三-羟基喹啉对硅醇盐进行化学改性，3）研究了用光敏ZrO_2制作Bragg衍射光栅的制备工艺，PZT和PLZT凝胶薄膜的相位掩模和双光束-4）凝胶膜在双光束干涉条纹下的两次曝光得到了两个不同的干涉条纹，并对两个干涉条纹的强度和强度进行了比较。5）用β-二酮和甲基丙烯酸同时对钛醇盐进行化学改性，使所得凝胶膜的光敏性和分辨率都有所提高。用分子轨道法计算了不同β-二酮修饰的金属醇盐的电子态，7）在SnO_2-SiO_2-SiO_2-SiO_2复合膜上沉积图案化TiO_2膜的双层型光催化剂。已经提出了涂覆的玻璃基底，并且这种新型的光催化剂已经被证明对于从甲醇中获取氢以及分解有害有机化合物具有高活性。