Preparation of Functional Thin Films and Fine-Patterning by the Photo-Assisted Process

本研究旨在利用光辅助技术制备功能薄膜和建立精细图案化工艺，结果表明：1)苯甲酰丙酮修饰的Al_2O_3凝胶膜在大气中最稳定，光敏性最好；2)ESCA光谱表明，紫外光照射改变了凝胶薄膜中碳原子的成键状态，降低了凝胶薄膜中的碳含量；3)以正硅酸乙酯和改性醇铝为原料制备的Al_2O_3-SiO_2体系凝胶薄膜对Al_2O_3含量在30mol%以上具有光敏性；4)PLZT凝胶薄膜厚度在1微米以上，可通过反复涂布和干燥得到，并可通过紫外光照射形成图案化5)将含有染料的SiO_2凝胶膜涂覆在经过掩膜照射的ZrO_2凝胶膜上，实现选择性变色，6)利用光敏凝胶膜制备了衍射栅，并对制备条件进行了评价。7)在光酸发生器存在下，用紫外光照射控制了正硅酸乙酯的水解，发现了含有光酸发生器的SiO_2凝胶膜形成微细图形的可能性。

The present study has been carried out for the purpose of preparing functional thin films and establishing fine-patterning process by the novel photo-assisted process, with the following result :1)Al_2O_3 gel films modified with benzoylacetone are the most stable in an ambient atmosphere and has the highest photosensitivity among the modified A1_2O_3 gel films ; Benzophenone has been found to act as a sensitizer for these gel films.2)ESCA spectra have shown that the UV-irradiation of modified ZrO_2 gel films changes the bonding situation of carbon atom and decreases the carbon content in the gel films.3)Gel films in the Al_2O_3-SiO_2 system prepared from TEOS and modified Al-alkoxide show the photosensitive for the Al_2O_3 content of more than 30 mol%.4)Photosensitive PLZT gel films over 1 mum in thickness are obtainable by the repetition of coating and drying and can be patterned by the UV-irradiation and laching process.5)Selective coloration has been realized by the coating of SiO_2 gel films containing dye on ZrO_2 gel films irradiated through a mask, followed by rinse with water.6)Fabrication process of diffraction gratings has been developed using photosensitive gel films and the characteristics of the obtained gratings has been evaluated in terms of fabrication conditions.7)Hydrolysis of TEOS have been controlled with UV-irradiation in the presence of photo-acid generator and the possibility of fine-patterning has been found for SiO_2 gel films containing photo-acid generator.