Theory and application of nonlinear system identification, central and its integration based on Wiener model

本文研究一类Wiener型非线性系统的辨识与控制问题。将子空间方法与模型参数优化相结合，提出了一种新的基于维纳模型的参数辨识算法。辨识结果表明，维纳模型在捕捉非线性系统动态特性方面优于线性模型上级。基于EKF的控制器的建议维纳模型的设计和实施的假设，确定的维纳模型是完全可控和可观的。数值算例验证了所提出的辨识算法和控制设计的有效性。其次，将所提出的辨识算法应用于半导体快速热制程的温度控制。识别实验是针对RTP系统中所需的温度范围设计的。然后根据投入产出数据估计出Wiener模型的参数， 关于我们 控制器被设计成实现期望的温度响应。实验结果表明，控制辊能够在较宽的工作范围内控制整个硅片的动态响应和热均匀性，并针对模型参数变化缓慢的情况对控制系统进行了改进。尝试了一种基于滑模技术的鲁棒观测器。采用滑模观测器的另一个优点是避免了Riccati方程的在线计算，节省了控制系统的计算量。提出了一种基于维纳模型的在线辨识算法，用于捕获模型参数的方差。然后利用奇异值分解技术，得到了模型内部特征的慢变特性。针对鲁棒控制系统，建立了系统故障判据。少

This study is concerned with the problem of identification and control of a Wiener type nonlinear systems. A new parametric identification algorithm based on the Wiener model is derived by using both subspace method and model parameter optimization. The identification result shows that the Wiener model is superior to a linear model in capturing the dynamics of nonlinear system. An EKF-based controller for proposed Wiener model is designed and implemented subject to the assumption that an identified Wiener model is completely controllable and observable. The numerical example demonstrates the validity of both proposed identification algorithm and control design.Next, we applied the algorithms to the temperature control of rapid thermal process in semiconductor manufactory. The identification experiment was designed with respect to the desired temperature range in The RTP system. The parameter of Wiener, model was then estimated from input-output data Based on obtained wiener model, the … More controller was designed to achieve the desired temperature response. The control experiment was performed to verify our control design and the results shows that the con roller is capable of steering the dynamic response and thermal uniformity across a wafer over a wide operating envelope.We also improved the control system with respect to the case that the model parameter is varying slowly. A robust observer based on the sliding mode technique was attempted. The other advantage to use sliding mode observers is to avoid online calculation of Riccati equation, which- saves the calculation cost in the control system.The development of the algorithm for fault detection has been studied at the same pace with system identification and control design. An online identification algorithm based on the wiener model was developed for capturing the model parameter variance. Then by using singular value decomposition technique, we obtain the slow variation of model inner character. A standard for system fault has been established for robust control system. Less