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Nanoscopic replication mechanism of surface microgeometry in technology of plasticity.

可塑性技术中表面微观几何形状的纳米复制机制。

基本信息

批准号：
12650729
负责人：
IKE Hiroshi
金额：
$ 2.75万
依托单位：
RIKEN-The Institute of Physical and Chemical Reseach
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650729/
关键词：
Surface microgeometry coining forging progressive forming replication metal forming Atomic Force Microscope

项目摘要

In the 21st century various aspects of human life need microscopic parts and metal forming technology should have respond these requirements. An extension of coining process, one of the branch of forging process in metal forming was tried to enable nanoscopic replication of surface microgeometry of punch surfaces,As a general tool for evaluating 3-D precision of replication of surface microgeometry, a new method is developed based on geometry acquisition by AFM and a new computer software. In the software 3-D geometrical data of tool surface and workpiece surface were superimposed and optimum configuration was searchecd by minimizing the average spacing of a particular area.A new device for nanoscopic replication in metalforming named "Progressive Nanometer-Scale Metal Forming Machine" wvas developed. It enables two-step or multi-step forming on a hydraulic press by accurate and quick change of coining punch. Crossed grooves and indents were made by scratching and indentation of diamond indenters. The two-step coining process, where global shape forming and nanoscopic repiication of surface microgeometry are separated to each step, gave fairly good replication. The average spacing of a target area of 50um x 50um was evaluated less than 40nm by the above method.

在21世纪的世纪，人类生活的各个方面都需要微型零件，而金属成形技术也应该对这些要求做出响应。作为金属成形中锻造工艺的分支之一的压印工艺的延伸，尝试实现冲压表面微观形貌的纳米级复制。作为评价表面微观形貌复制三维精度的通用工具，提出了一种基于原子力显微镜（AFM）的形貌获取和新的计算机软件的新方法。该软件将模具表面和工件表面的三维几何数据进行叠加，以最小化特定区域的平均间距为优化目标进行优化配置，研制了一种新型的金属成形纳米级复制装置--“渐进式纳米级金属成形机”。通过精确快速地更换压印冲头，可在液压机上实现两步或多步成形。用金刚石压头刻划和压入形成交叉凹槽和压痕。两步压印工艺，其中整体形状形成和表面微观几何形状的纳米级复制被分离到每个步骤，给出了相当好的复制。通过上述方法评估50 μ π ι X 50 μ π ι的靶区域的平均间距小于40 nm。