Nanoscopic replication mechanism of surface microgeometry in technology of plasticity.

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In the 21st century various aspects of human life need microscopic parts and metal forming technology should have respond these requirements. An extension of coining process, one of the branch of forging process in metal forming was tried to enable nanoscopic replication of surface microgeometry of punch surfaces,As a general tool for evaluating 3-D precision of replication of surface microgeometry, a new method is developed based on geometry acquisition by AFM and a new computer software. In the software 3-D geometrical data of tool surface and workpiece surface were superimposed and optimum configuration was searchecd by minimizing the average spacing of a particular area.A new device for nanoscopic replication in metalforming named "Progressive Nanometer-Scale Metal Forming Machine" wvas developed. It enables two-step or multi-step forming on a hydraulic press by accurate and quick change of coining punch. Crossed grooves and indents were made by scratching and indentation of diamond indenters. The two-step coining process, where global shape forming and nanoscopic repiication of surface microgeometry are separated to each step, gave fairly good replication. The average spacing of a target area of 50um x 50um was evaluated less than 40nm by the above method.