Nanoscopic replication mechanism of surface microgeometry in technology of plasticity.

在21世纪，人类生活的方方面面都需要微型零件，而金属成形技术也应该响应这些要求。为了实现冲头表面微观几何形状的纳米复制，对金属成形中锻造工艺的一个分支--压延工艺进行了扩展，作为评价表面微观几何形状复制三维精度的通用工具，提出了一种基于AFM几何获取和新的计算机软件的新方法。在该软件中，将刀具表面和工件表面的三维几何数据进行叠加，通过最小化特定区域的平均间距来搜索最优构形。研制了一种新型的金属成形纳米级复制装置--“渐进纳米级金属成形机”。通过准确、快速地更换造币冲头，可在液压机上实现两步或多步成形。交叉凹槽和压痕是通过对钻石压头进行划痕和压痕制成的。两步铸造工艺，其中表面微几何的全局形状形成和纳米级复制被分离到每一步，提供了相当好的重复性。用上述方法计算了靶区50um×50um的平均间距小于40 nm。

In the 21st century various aspects of human life need microscopic parts and metal forming technology should have respond these requirements. An extension of coining process, one of the branch of forging process in metal forming was tried to enable nanoscopic replication of surface microgeometry of punch surfaces,As a general tool for evaluating 3-D precision of replication of surface microgeometry, a new method is developed based on geometry acquisition by AFM and a new computer software. In the software 3-D geometrical data of tool surface and workpiece surface were superimposed and optimum configuration was searchecd by minimizing the average spacing of a particular area.A new device for nanoscopic replication in metalforming named "Progressive Nanometer-Scale Metal Forming Machine" wvas developed. It enables two-step or multi-step forming on a hydraulic press by accurate and quick change of coining punch. Crossed grooves and indents were made by scratching and indentation of diamond indenters. The two-step coining process, where global shape forming and nanoscopic repiication of surface microgeometry are separated to each step, gave fairly good replication. The average spacing of a target area of 50um x 50um was evaluated less than 40nm by the above method.