Multi-function-integrated Micro Systems Using Polymer Materials

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In this research, we worked on techniques to integrate polymers, organic semiconductors and proteins into micro electro mechanical systems.We introduced a patterning method for organic LEDs. We patterned the OLED layers by pressing the layer with a micro edges fabricated on a silicon wafer. This enabled us to fabricate 30-micro-meter-wide LED stripe arrays. We also fabricate an OLED on a released silicon microstructure.We fabricated a vertical organic transistor. It was designed as a current driver for OLEDs. Since it has a vertical structure, it is suitable to be arranged on/under an OLED. We report a biomolecular image sensor using a retinal membrane protein. To fabricate the photoreceptor array, a bR-patterning method with electro-deposition and surface modification was developed. An image sensor, which consists of an 8x8 array of 1-millimeter square bR photoreceptors, was fabricated. It was demonstrated that the image sensor detected a gradual image and black and white images.We propose a tactile sensor consisting of standing 300 nm-thick piezoresistive cantilevers embedded in PDMS. The sensor detects the shear stress applied on its surface. We applied the force of 0 [N] to 20 [N] in the X,Y,and Z directions to the sensor. The sensor showed a good linearity and high sensitivity in X-axis.