A MEMS cantilever for stimulus response measurements of single cells

用于单细胞刺激响应测量的 MEMS 悬臂梁

• 批准号: 22241033
• 负责人: SHIMOYAMA Isao
• 金额: $ 26.62万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-22241033/
• 关键词: マイクロセンサー; MEMS; 3軸力センサ; ピエゾ抵抗型カンチレバー

In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device.

本计画主要研究三轴MEMS力感测悬臂梁。该传感器在悬臂梁的根部配备有用于力感测的压敏电阻器，使得可以对生物细胞施加定量的机械刺激。MEMS悬臂梁由SOI晶片制成。通过热扩散在梁结构的悬臂梁根部或侧壁表面形成压阻层，从而可以同时检测相应的三维力。可测力的分辨率为1 uN的所有三个方向的力，和三轴力可以独立测量与设备。

项目成果

A Gas Sensor Based on Viscosity Change of Ionic Liquid

一种基于离子液体粘度变化的气体传感器

• 发表时间: 2011
• 作者: Kazuharu Ohsawa;Hidetoshi Takahashi;Kentaro Noda;Tetsuo Kan;Kiyoshi Matsumoto and Isao Shimoyama
• 通讯作者: Kiyoshi Matsumoto and Isao Shimoyama

サイドウォールドーピングを用いたピエゾ抵抗型三軸力センサ

使用侧壁掺杂的压阻三轴力传感器

• 发表时间: 2011
• 作者: 齋藤 徹;山口正人;平出正孝;菅哲朗 ,高橋英俊 ,青山雄一郎 ,竹井裕介,野田堅太郎 ,松本潔 ,下山勲
• 通讯作者: 菅哲朗 ,高橋英俊 ,青山雄一郎 ,竹井裕介,野田堅太郎 ,松本潔 ,下山勲

SI NANO-PILLARS FOR MEASURING TRACTION FORCE EXERTED BY FILOPODIA

用于测量丝状伪足施加的牵引力的硅纳米柱

• 发表时间: 2012
• 作者: Uijin Jung;Tetsuo Kan;Kenta Kuwana;Kiyoshi Matsumoto;Isao Shimoyama
• 通讯作者: Isao Shimoyama

Differential pressure distribution measurement of a free-flying butterfly wing

• DOI: 10.1109/transducers.2011.5969207
• 发表时间: 2011-06
• 期刊: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
• 作者: H. Takahashi;K. Matsumoto;I. Shimoyama

サイドウォールドーピングを用いたピエゾ抵抗型三軸カセンサ

使用侧壁掺杂的压阻三轴传感器

• 发表时间: 2011
• 作者: 菅哲朗;高橋英俊;青山雄一郎;竹井裕介;野田堅太郎;松本潔;下山勲
• 通讯作者: 下山勲