Study on Dynamics and Control of Silicon Microarm

本研究的最初目标是制造一个类似于传统机械臂的硅微臂。然而，我放弃了这个目标，因为(1)微关节的制造非常困难，(2)表面的摩擦阻碍了平滑的旋转。微观世界中存在合适的机制。为了消除表面摩擦，我提出了基于昆虫结构的外骨骼和弹性关节。此外，位于磁场中的永磁体驱动微机械臂。这种方法不需要电线供电。以该机械手为例，给出了运动方程和实验数据，验证了该方法的有效性。

The initial goal of this study is to make a silicon microarm, which is similar to a conventional manipulator. However, I gave up the goal because (1) fabrication of microjoints is so difficult to make and (2) friction on surface prevents smooth rotation. The suitable mechanisms exit in microworld. In order to eliminate surface friction, I've proposed external skeleton and elastic joints which is based on insect structure. Moreover, permanent magnets located in magnetic field drive a micromanipulator. This method does not require wires to supply energy. In case of this manipulator, the equation of motion and experimental data are obtained and the validity is confirmed.