Ultra precise 2-dimensional atomic tracking control for atom craft

原子飞行器超精密二维原子跟踪控制

• 批准号: 13650114
• 负责人: AKETAGAWA Masato
• 金额: $ 2.3万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650114/
• 关键词: Atom Craft; SPM (STM); Atomic Tracking; positioning; sub nanometer; disturbance; トレーサビリティ; サブナノメートル精度; 走査型トンネル顕微鏡(STM); 原子間力顕微鏡(AFM)

In this research, for the promote of the nanotechnology, we propose a compact absolute length measuring machine (ALMM) with sub-nanometer accuracy and sub-millimeter travel by combining crystalline lattice and the phase modulation homodyne laser interferometry. With the ALMM, an arbitrary length can be determined by combining fine scale (= lattice spacing) and coarse scale (= wavelength). The following results were obtained with the aid.(1) Ultra precise /stable laser interferometer system ; We developed a phase modulation homodyne laser interferometer with multi-path configuration, which can determine length incase optical path difference equals to products of wavelength and integer. A positioning control system for the stage using the interferometer, a fast DSP and precise AD/DA was also developed.(2) High stiff STM and ultra precise sample stage; A high stiff STM and a precise stage with the range of 10 micrometer and the resonance frequency is over 2kHz was developed using a flexture springs. It is easy to detect atomic image of graphite (HOPG) by combining the two instruments.(3) Direct measurement of lattice spacing on HOPG surface ; By comparing the atomic STM image of HOPG with the displacement of the sample stage, the lattice spacing on the HOPG surface was determined with high accuracy.(4) Protype of ALMM; We developed the protype of the ALMM, which included the phase modulation interferometer, dual sample stages, high stiff AFM/STM heads, thermo-stabilized vacuum cell. The performance has been evaluated.

在本研究中，为了促进纳米技术的发展，我们提出了一种结合晶格和相位调制纯差激光干涉测量的亚纳米精度和亚毫米行程的紧凑型绝对长度测量机（ALMM）。使用ALMM，可以通过结合精细尺度（=晶格间距）和粗尺度（=波长）来确定任意长度。使用该助剂得到了以下结果：(1)超精密/稳定激光干涉仪系统；研制了一种相位调制的多路纯差激光干涉仪，在光程差等于波长与整数乘积的情况下，可以确定激光的长度。利用干涉仪、快速DSP和精密AD/DA组成了舞台定位控制系统。(2)高硬度STM和超精密样品台；利用挠性弹簧，研制出了一种高刚度STM和精密工作台，其范围为10微米，谐振频率超过2kHz。将这两种仪器结合使用，可以方便地检测石墨的原子图像。(3) HOPG表面晶格间距的直接测量；通过将HOPG的原子STM图像与样品平台的位移进行比较，可以高精度地确定HOPG表面的晶格间距。(4) ALMM样机；我们开发了ALMM的原型，其中包括相位调制干涉仪，双样品级，高硬度AFM/STM头，热稳定真空池。业绩已经评估过了。

项目成果

渡辺友典, P.Perkkumsup, 定方心, 明田川正人, 高田孝次: "結晶格子表面の格子定数測定装置の試作(第4報:格子間隔の試行測定)"2002年度精密工学会春季大会学術講演会講演論文集. 721 (2002)

Tomonori Watanabe、P.Perkkumsup、Shin Sadakata、Masato Aketakawa、Koji Takada：“用于测量晶格表面晶格常数的装置的原型（第四次报告：晶格间距的试验测量）” 2002年精密工程学会春季学术演讲会议论文集721（2002）。

Masato Aketagawa, Pongpun Rerkkumsup, Koji Takada: "Direct measurement of lattice spacing on regular crystalline surface using scanning tunneling microscope and laser inetrferometry"Proc. of the 17th Annual Meeting of the American Society for Precision En

Masato Aketakawa、Pongpun Rerkkumsup、Koji Takada：“使用扫描隧道显微镜和激光干涉测量法直接测量规则晶体表面上的晶格间距”Proc。

Masato Aketagawa, Pongpun Rerhhumsup, Koji Takada, Toshio: "Compact Absolute Length Mesuring Machine by Combining Regular Crystalline Surface and Laser Interferometry"Proc. of the 16th Annual Meeting of the American Society for Precision Engineering, Arli

Masato Aketakawa、Pongpun Rerhhumsup、Koji Takada、Toshio：“结合规则晶体表面和激光干涉测量的紧凑型绝对长度测量机”Proc。

M.Aketagawa, P.Rerkkumsup et al.: "Compact abosolute length measuring machine by combining regular crystalline lattice and laser interferometry"Proceedings of American Society for Precision Engineering 2001 Annual Meeting. 107-110 (2001)

M.Aketakawa、P.Rerkkumsup 等人：“Compact absolute 长度测量机结合规则晶格和激光干涉测量”美国精密工程学会 2001 年年会论文集。