結晶格子をスケールとするサブナノメートル測長・加工機の開発研究

点击翻译按钮获取中文摘要

A lattice spacing of approximately 0.2 nm is stable and uniform over long range when the crystal are stress free. Using a scanning tunneling microscope (STM), it is possible to obtain an atomic image on crystalline surface in air. A digital lattice scale, obtained by combining a crystalline surface as reference scale and a STM as a detector, offer one method to measure length or displacement with subnanometer resolution. The following results were obtained.(1) An ultralow thermally drifted STM was constructed from ultralow linear expansion glass. Thermo-stabilized cell with temperature fluctuation of less than 0.05K was also developed. Using the both instruments minimum thermal drift of less than 0.2 nm/h at room temperature was achieved and a 5-micrometer-long atomic image of graphite was obtained. This result show feasibility of length measurement over 5-micrometer using regular crystalline lattice.(2) Tracking and movement control of the tip position of a STM by referring to atomic array on regular crystalline surface was developed. The maximum tracking length along atomic array on crystalline of graphite was around 100 nm. This control method can be extended to real-time length measurement with subnanometer resolution using regular crystalline lattice.