Visualization of Propagation of Surface Acoustic Waves in GHz Range by Laser Probing

通过激光探测可视化 GHz 范围内的表面声波传播

• 批准号: 13650394
• 负责人: HASHIMOTO Ken-ya
• 金额: $ 2.24万
• 依托单位: CHIBA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650394/
• 关键词: Surface Acoustic Wave; Visualization; SAW device; Laser Probe; Animation; ヘテロダイン

Surface-Acoustic-Wave (SAW) devices are widely used in present mobile communication systems because of their compactness and high performances. This research discussed use of the laser probe method for the visualization of the SAW propagation in GHz range and its applicability to the diagnosis tool for high performance SAW devices. First, the laser probing system was constructed. For fast and precise measurement for both SAW amplitude and phase, we employed so called the knife edge method. For the operation in GHz range, we use the combination of prism mirror and high-speed photo diode instead of the knife-edge or the position-sensitive photo diode. The coherent detection was employed for the signal detection. Through the measurement, it was shown that the system is highly sensitive, wideband and large dynamic range more than 60 dB. The present system is more attractive than the system based on the Michelson interferometer from various aspects, such as precise measurement the phase response, insensitivity to ground vibration, etc. Then the extraction of SAW properties from the measured data was also investigated. By the use of phase and amplitude information, the SAW propagation can be characterized in the wavenumber domain as the Fourier transform (spectrum) of the spatial distribution. The spectral analysis was applied to extract various properties. For example, various resonance modes can be identified and separated, and variation of the laser reflection coefficient can be compensated through the evaluation of the field distribution function. Furthermore, it was shown that the SAW propagation can be easily understandable by constructing its animation movie. These results clearly shows effectiveness of the laser probe method as the diagnosis tool for high performance SAW devices.

声表面波（SAW）器件由于其紧凑性和高性能而广泛应用于当前的移动通信系统中。本研究讨论了使用激光探针方法来可视化 GHz 范围内的 SAW 传播及其对高性能 SAW 器件诊断工具的适用性。首先，构建了激光探测系统。为了快速、精确地测量 SAW 幅度和相位，我们采用了所谓的刀口法。对于GHz范围内的操作，我们使用棱镜和高速光电二极管的组合来代替刀口或位置敏感光电二极管。采用相干检测来进行信号检测。通过测试表明，该系统具有高灵敏度、宽频带和大于60 dB的大动态范围。本系统从各个方面都比基于迈克尔逊干涉仪的系统更具吸引力，例如精确测量相位响应、对地面振动不敏感等。然后还研究了从测量数据中提取声表面波特性。通过使用相位和幅度信息，SAW 传播可以在波数域中表征为空间分布的傅立叶变换（频谱）。应用光谱分析来提取各种特性。例如，可以识别和分离各种谐振模式，并且可以通过场分布函数的评估来补偿激光反射系数的变化。此外，还表明通过构建动画电影可以轻松理解 SAW 传播。这些结果清楚地表明了激光探针方法作为高性能 SAW 器件诊断工具的有效性。

项目成果

K. Hashimoto et al.: "Design Considerations on Wide-band Longitudinally-Coupled Double-Mode SAW Filters"Meeting Report, IEICE. US2002-49. 19-24 (2002)

K. Hashimoto 等人：“宽带纵向耦合双模 SAW 滤波器的设计考虑”会议报告，IEICE。

K.Hashimoto et al.: "Design Considerations on Wideband Longitudinally-Coupled Double-Mode SAW Filters"Proc. IEEE Ultrasonics Symposium. (印刷中). (2003)

K. Hashimoto 等人：“宽带纵向耦合双模 SAW 滤波器的设计考虑”Proc。IEEE 超声研讨会（2003 年）。

K. Hashimoto et al.: "Behaviour of SAW devices as a multi-port circuit"Convention Record, IEICE. 283-284 (2001)

K. Hashimoto 等人：“SAW 器件作为多端口电路的行为”会议记录，IEICE。

R.Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"日本学術振興会第150委員会第75回研究会資料. 79-84 (2002)

R. Nakakawa 等人：“SAW 波导中泄漏模式的激励和传播特性分析”日本学术振兴会第 150 届委员会第 75 次研究会议材料 79-84 (2002)。

小澤寛司他: "電子線直接露光法によるSAWデバイス作製に関する基礎的検討"第31回EMシンポジウム予稿集. 131-136 (2002)

Hiroshi Ozawa 等人：“使用电子束直接曝光方法制造 SAW 器件的基础研究”第 31 届 EM 研讨会论文集 131-136 (2002)。