Two Dimensional Laser Probe for detection of Longitudinal Wave Vibration in GHz Range

用于检测 GHz 范围内的纵波振动的二维激光探头

• 批准号: 19360154
• 负责人: HASHIMOTO Ken-ya
• 金额: $ 11.48万
• 依托单位: Chiba University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2007
• 资助国家: 日本
• 起止时间: 2007 至 2009
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19360154/
• 关键词: 弾性表面波; レーザープローブ; サニャック干渉計; 縦振動; バルク弾性波; 干渉計

The authors developed a phase-sensitive and fast- scanning laser probing system for the diagnosis of radio frequency (RF) bulk acoustic wave (BAW) devices. The system is based on the Sagnac interferometer, which is insensitive to low frequency vibration. We also developed a new auto-focusing system for solving the defocusing problem arisen when the specimen surface is uneven and/or canted and a high magnification lens is employed. It was demonstrated that high quality two-dimensional (2D) image of vibration field patterns can be captured in minutes order for RF BAW devices operating in 2GHz range with 100x lens. The wavenumber domain analysis was also applied for the measurement data, and it was revealed how and where the energy leakage occurs in the device under concern.

研制了一种用于射频体声波器件诊断的相敏快速扫描激光探针系统。该系统是基于Sagnac干涉仪，这是不敏感的低频振动。我们还开发了一种新的自动聚焦系统，用于解决当样品表面不平坦和/或倾斜时出现的散焦问题，并采用高放大率透镜。实验结果表明，对于工作在2GHz频段的高频体声波器件，采用100倍透镜，可以在几分钟内获得高质量的振动场二维图像。对测量数据进行了波数域分析，揭示了能量泄漏在器件中发生的方式和位置。

项目成果

Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range

2 GHz 范围内声表面波器件快速扫描相敏激光探头检测系统的改进

• 发表时间: 2008
• 期刊: Jpn.J.Appl.Phys. 47, 5B
• 作者: K. Kashiwa;T. Omori;K. Hashimoto;M. Yamaguchi
• 通讯作者: M. Yamaguchi

Quantitative Analysis of Power Leakage in an FBAR Device at the Anti-Resonance Frequency

反谐振频率下 FBAR 器件漏电的定量分析

• 发表时间: 2010
• 期刊: Jpn.J.Appl.Phys. 49, 7(to be published)
• 作者: F. Thalmayr;K. Hashimoto;M. Ueda;T. Omori;M. Yamaguchi
• 通讯作者: M. Yamaguchi

Change in piezoelectric boundary acoustic wave characteristics with overlay and metal grating materials

• DOI: 10.1109/tuffc.2010.1373
• 发表时间: 2010
• 期刊: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
• 作者: Yiliu Wang;K. Hashimoto;T. Omori;M. Yamaguchi

Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices

适用于 RF SAW/BAW 器件的相敏和快速扫描激光探针系统

• 发表时间: 2010
• 期刊: Proc.IUTAM Symposium of Acoustic Waves in Solids (印刷中)
• 作者: K.Hashimoto;N.Wu;K.Kashiwa;T.Omori;M.Yamaguchi
• 通讯作者: M.Yamaguchi

高周波MEMS素子用超高速2次元走査光プローブの開発

高频MEMS器件超高速二维扫描光学探针的研制

• 发表时间: 2009
• 期刊: 検査技術 14
• 作者: 橋本研也;呉楠
• 通讯作者: 呉楠