The control of the flow in the micro channel with the nano-flow sensors

利用纳米流量传感器控制微通道内的流量

• 批准号: 14550228
• 负责人: ICHIKAWA Yasumasa
• 金额: $ 2.56万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550228/
• 关键词: MEMS; Micro Fluidics; Micro Channel; Mass Flow Rate; Surface Tension; Hot Wire; Micro Venturi; PDMS; SWNT

In the research program for 2 years, we had 3 projects which are the trial manufacture of the channel for the calibration, the development of the flow sensor chip and the performance evaluation of the micro channel which built in the nano flow sensor. With this plan, we have constructed the micro channels which have 100icro meter width and 80micro meter dips with the venture structure, and the performance evaluation was done in 2002. We have some result for the developments of micro fluidics sensor in the experimental research such as the dissolution of the gas to the liquid phase can not be disregarded in the pump and the pressure gage using the difference in gas-liquid interface, methods of the micro channel design and so on. In 2003, we have constructed the micro-pumps with the electro osmotic flow and we have obtained the basic knowledge on the carbon nano-tube flow sensor. We succeeded in carrying out the experiment in which the carbon nano-tube is made to grow in the micro structure on silicon wafer, and bridged with the nanotube between the micro structures interval of about 10micro meter.The possibility of flow velocity distribution in the sub micron region was shown by these experiments.

在两年的研究计划中，我们完成了3个项目，分别是校准用通道的试制、流量传感器芯片的开发以及纳米流量传感器内置微通道的性能评估。以此方案，我们构建了具有Venture结构的宽度为100微米、倾角为80微米的微通道，并于2002年进行了性能评估。我们在实验研究中对微流体传感器的发展取得了一些成果，如利用气液界面差异的泵和压力表中不能忽视气体向液相的溶解、微通道的设计方法等。 2003年，我们构建了电渗流微型泵，并获得了碳纳米管流量传感器的基础知识。我们成功地进行了在硅片上的微结构中生长碳纳米管的实验，并在微结构之间以约10微米的间隔与纳米管桥接。这些实验表明了亚微米区域流速分布的可能性。

项目成果

市川保正, 尾上弘晃, 山田雄士, 下山勲: "生物混相流のマイクロ特性"日本機械学会平成16年度年次大会講演会. (2004)

Yasumasa Ichikawa、Hiroaki Onoe、Yuji Yamada、Isao Shimoyama：“生物多相流的微观特征”日本机械工程师学会2004年年会。（2004）

市川保正, 星野一憲, 松本潔, 下山勲: "オンチップ流動センサの特性"日本機械学会熱工学講演会講演論文集. 135-136 (2002)

Yasumasa Ichikawa、Kazunori Hoshino、Kiyoshi Matsumoto、Isao Shimoyama：“片上流量传感器的特性”日本机械工程师学会热工会议录 135-136 (2002)。

Yasumasa Ichikawa, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama: "Charactristics of on chip flow sensor"proc.of JSME conference of Thermal engineering 2002. 135-136 (2002)

Yasumasa Ichikawa、Kazunori Hoshino、Kiyoshi Matsumoto、Isao Shimoyama：“片上流量传感器的特性”proc.of JSME 热工会议 2002. 135-136 (2002)

Yasumasa Ichikawa, Hiroaki Onoe, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama: "Characteristics of the multiphase flow in the micro channel with the surface modification"proc.of conference of Japan Society of Multi Phase Flow 2004. (2004)

Yasumasa Ichikawa、Hiroaki Onoe、Kazunori Hoshino、Kiyoshi Matsumoto、Isao Shimoyama：“表面改性微通道中多相流的特性”2004年日本多相流学会会议记录。(2004)

Kazunori Hoshino, Isao Shimoyama: "Analysis of elastic micro optical components under large deformation"Journal of Micro-mechanics and Micro-engineering. Vol.13. 149-154 (2003)

Kazunori Hoshino、Isao Shimoyama：“大变形下弹性微光学元件的分析”微机械与微工程杂志。