The control of the flow in the micro channel with the nano-flow sensors

在两年的研究计划中，我们有3个项目，分别是用于校准的通道的试制、流量传感器芯片的研制和内置纳米流量传感器的微通道的性能评价。在此基础上，建立了具有100微米宽、80微米倾角的风投结构微通道，并于2002年进行了性能评估。在实验研究中，我们对微流体传感器的发展取得了一些成果，如利用气液界面的差异性、微通道的设计方法等，在泵和压力计中的气液两相溶解是不可忽视的。2003年，我们构建了电渗流微泵，对碳纳米管流量传感器的基础知识有了初步的了解。我们成功地在硅片上的微结构中生长了碳纳米管，并与纳米管连接在约10微米的微结构之间，通过这些实验证明了在亚微米区域内流动速度分布的可能性。

In the research program for 2 years, we had 3 projects which are the trial manufacture of the channel for the calibration, the development of the flow sensor chip and the performance evaluation of the micro channel which built in the nano flow sensor. With this plan, we have constructed the micro channels which have 100icro meter width and 80micro meter dips with the venture structure, and the performance evaluation was done in 2002. We have some result for the developments of micro fluidics sensor in the experimental research such as the dissolution of the gas to the liquid phase can not be disregarded in the pump and the pressure gage using the difference in gas-liquid interface, methods of the micro channel design and so on. In 2003, we have constructed the micro-pumps with the electro osmotic flow and we have obtained the basic knowledge on the carbon nano-tube flow sensor. We succeeded in carrying out the experiment in which the carbon nano-tube is made to grow in the micro structure on silicon wafer, and bridged with the nanotube between the micro structures interval of about 10micro meter.The possibility of flow velocity distribution in the sub micron region was shown by these experiments.