Nano-scale optical elements by fine patterning of self-assembled monolayers

通过自组装单层精细图案化实现纳米级光学元件

• 批准号: 14550229
• 负责人: FUKUDA Katsumi
• 金额: $ 2.3万
• 依托单位: Tokyo National College of Technology (2004)The University of Tokyo (2002-2003)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550229/
• 关键词: self-assembled; monolayers; surface active; patterning; micro contact printing; hydrophilic; hydrophobic; nano-scale optical elements; ナノ光学素子; 接触角; 親水性; 疎水性; マイクロパターニング; コンタクトプリンティング; 自己組織化単分子膜; 親水性,疎水性; ナノインデンテーション; アルカンチオール; アミノシラン

This project is on a fabrication method of nano-scale optical elements using micro contact printing (uCP). Alkyl silane molecules were coated on poly(dimethylsyloxane) (PDMS) stamps with nano- to micro-patterns, and transferred the molecules onto a glass wafer to form a self-assembled monolayer (SAM). Then, the molecules were labeled by fluorescent molecules to enhance optical properties. We used PDMS as a material of the stamps. The patterns of the stamps were transferred from silicon molds, which were fabricated with isotropic etching or electron beam (EB) direct lithography.Firstly, stamps with micro-scale lines and spaces were used to confirm the feasibility of SAM patterning. We coated Aminopropyltriethoxysilane (APTES), which has amino group at its terminal, on the PDMS stamps, and pressed the stamp onto glass wafer. The patterned APTES were labeled by the fluorescent dye molecules (FITC), and observed with fluorescent microscope. The pattern was evaluated by comparing the line width of the stamps and the patterned APTES. For suitable patterning, the pressing time and pressure were found to be 15 seconds and 20 grams, respectively.Secondly, nano-scale optical elements were fabricated. The FITC itself was used as an optical element. Combining the nano-scale patterning of APTES and the FITC labeling, we successfully achieved to fabricate nano-scale optical element. Using PDMS stamps of an illustration, which was drawn with sub-micron lines, APTES was patterned on a glass wafer. The FITC were bound to the patterned APTES. We successfully observed that the fluorescent molecules were surely patterned along the APTES with nano-order resolution, and confirmed that the fluorescent molecules work as nano-scale optical elements.

本项目研究的是利用微接触印刷（uCP）制造纳米级光学元件的方法。将烷基硅烷分子涂覆在具有纳米到微观图案的聚二甲基硅氧烷（PDMS）印章上，并将分子转移到玻璃晶片上形成自组装单层（SAM）。然后，用荧光分子标记分子以增强光学性质。我们使用PDMS作为邮票的材料。邮票的图案是从硅模上转移过来的，硅模是用各向同性蚀刻或电子束直接光刻制造的。首先，利用具有微尺度线条和空间的邮票来验证SAM图像化的可行性。我们将末端有氨基的氨基丙基三乙氧基硅烷（APTES）涂覆在PDMS印章上，并将印章压在玻璃晶片上。利用荧光染料分子（FITC）对APTES进行标记，并用荧光显微镜观察。通过比较邮票和图案APTES的线宽来评估图案。对于合适的图案，压榨时间和压力分别为15秒和20克。其次，制备了纳米级光学元件。FITC本身被用作光学元件。结合APTES的纳米尺度图像化和FITC标记，我们成功地实现了纳米尺度光学元件的制造。利用用亚微米线绘制的插图的PDMS邮票，将APTES图案绘制在玻璃晶圆上。FITC与有图案的APTES绑定。我们成功地观察到荧光分子沿着APTES具有纳米级分辨率，并证实了荧光分子作为纳米级光学元件的作用。