PREPARATION OF PIEZOELECTRIC PZT THIN FILMS BY HYBRID PROCESSING

混合加工制备压电 PZT 薄膜

• 批准号: 14550695
• 负责人: WANG Zhan jie
• 金额: $ 2.3万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550695/
• 关键词: PZT thin film; sol-gel method; laser ablation; hybrid processing; preferred orientation; electrical properties; piezoelectric properties; micro actuator; マイクロアクチュェータ

Thin films of Pb(Zr_xTi_<1-x>)O_3 (PZT) were prepared by hybrid processing (sol-gel method and laser ablation) on Pt/Ti/SiO_2/Si substrates. The temperature of post-deposition annealing in hybrid processing is lower than that in the case of direct film deposition by laser ablation on a Pt/Ti/SiO_2/Si substrate. The preferred orientation of the films derived by hybrid processing can be controlled using the layer deposited by the sol-gel method. The films fabricated by hybrid processing consist of the perovskite phase with a (111)-preferred orientation and have good ferroelectric properties. The effect of Zr/Ti ratio on the electrical properties and crystal structure as well as microstructure of the PZT films was investigated, too. It was found that the PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than that derived from the target with a Zr/Ti ratio of 52/48, and their composition was close to the morphotropic phase boundary compositi … More on. The transmission electron microscopy image showed that the films had a polycrystalline columnar microstructure extending through the thickness of the film, and no sharp interface was observed between the layers obtained by the sol-gel method and laser ablation. The HTEM image also revealed that the crystalline lattice of the layers was continuous and there was no difference in. crystalline orientation between the layers obtained by the sol-gel method and laser ablation. These results indicated that the lower PZT layer deposited by the sol-gel method acted as a seed layer for the crystallization of the upper PZT layer deposited by laser ablation. The solid-phase epitaxial effect between the PZT layers deposited by the sol-gel method and laser ablation lowers the temperature of postdeposition annealing, and the preferred orientation of the PZT films can be controlled using the layer deposited by the sol-gel method. In the application, the micromirror actuated by the PZT film was designed and fabricated successfully with three-mask lithography process. The scanning performance is demonstrated while driving the device at the measured resonant frequency. Less

采用<1-x>溶胶-凝胶法和激光烧蚀法在Pt/Ti/SiO2/Si衬底上制备了Pb（Zr_xTi_）O_3（PZT）薄膜。在Pt/Ti/SiO_2/Si基片上，激光烧蚀直接成膜的退火温度低于激光烧蚀直接成膜的退火温度。通过混合处理得到的薄膜的择优取向可以使用通过溶胶-凝胶法沉积的层来控制。混合工艺制备的薄膜由钙钛矿相组成，具有（111）择优取向，并具有良好的铁电性能。研究了Zr/Ti比对PZT薄膜电学性能、晶体结构和微观结构的影响。结果表明，Zr/Ti比为45/55的靶制备的PZT薄膜比Zr/Ti比为52/48的靶制备的PZT薄膜具有更好的电学性能，其成分接近准同型相界成分。 ...更多信息 透射电子显微镜图像显示膜具有延伸穿过膜厚度的多晶柱状微观结构，并且在通过溶胶-凝胶法和激光烧蚀获得的层之间没有观察到尖锐的界面。HTEM图像还揭示了各层的晶格是连续的，并且没有差异。通过溶胶-凝胶法和激光烧蚀获得的层之间的晶体取向。这些结果表明，通过溶胶-凝胶法沉积的下PZT层作为种子层的结晶的上PZT层通过激光烧蚀沉积。通过溶胶-凝胶法和激光烧蚀法沉积的PZT层之间的固相外延效应降低了沉积后退火的温度，并且可以使用溶胶-凝胶法沉积的层来控制PZT膜的择优取向。在应用中，我们设计并制作了以PZT薄膜为驱动元件的压电陶瓷微位移传感器，采用三掩模光刻工艺成功地实现了压电陶瓷微位移传感器的制作。在测量的谐振频率下驱动器件时，证明了扫描性能。少

项目成果

Zhan Jie Wang: "Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer"Journal of the European Ceramic Society. 24(6). 1232-1269 (2004)

王占杰：“模板层上脉冲激光沉积 PZT 薄膜的制备和表征”欧洲陶瓷学会杂志。

Zhan Jie Wang: "Preparation and characterization of Lead Ziroconate Titanate Thin Films Derived by Hybrid processing : Sol-Gel Method and Pulsed Laser Deposition"Japanese Jounal of Applied physics. 42(9B). 5936-5940 (2003)

王占杰：“混合加工衍生的锆钛酸铅薄膜的制备和表征：溶胶-凝胶法和脉冲激光沉积”日本应用物理学杂志。

Zhan Jie Wang: "Preparetion of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing : Sol-Gel Method and Laser Ablation"J.Am.Ceram.Soc. 85・12. 3108-3110 (2002)

王展杰：“混合加工制备锆钛酸铅薄膜：溶胶-凝胶法和激光烧蚀”J.Am.Ceram.Soc. 85・12 (2002)。

Zhan Jie Wang: "Growth of lead zirconate titanate thin films by hybrid processing : sol-gel method and pulsed-laser deposition"Jounal of Crystal Growth. 262(1-4). 359-365 (2004)

王占杰：“通过混合处理生长锆钛酸铅薄膜：溶胶-凝胶法和脉冲激光沉积”晶体生长杂志。

Zhan Jie Wang: "Effect of Zr/Ti Ration in Targets on Electrical Properties of Lead Zirconate Titanete Thin Films Derived by Pulsed Laser Deposition on Template Layer"Jpn.J.Appl.Phys.. 41・11. 6658-6663 (2002)

王占杰：“靶材中的Zr/Ti比例对模板层上脉冲激光沉积衍生的锆酸铅钛薄膜的电性能的影响”Jpn.J.Appl.Phys.. 41・11 (2002)。