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Development of Picometer Positioning System and its Application for Ultraprecision Machining

皮米定位系统的研制及其在超精密加工中的应用

基本信息

批准号：
15360071
负责人：
MIZUMOTO Hiroshi
金额：
$ 9.86万
依托单位：
Tottori University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

For ultraprecision machine tool of the next generation, a tri-mode picometer positioning system is proposed. The positioning system has three positioning modes, namely coarse, fine and ultra-fine mode. The coarse mode for nanometer positioning with long stroke is executed by a twist-roller friction drive (TFD) mechanism and an ordinary AC servomotor. The fine mode for sub-nanometer positioning is also executed by the twist-roller friction drive mechanism, however the mechanism is driven by a piezoelectric actuator. The ultra-fine mode using an active inherent restrictor (AIR) incorporated into the aerostatic guideway realizes the picometer positioning.Two tri-mode positioning units are arranged in perpendicular, and each mode of the positioning system is controlled by a DSP (motion controller) with a microcomputer. Measured positioning resolution in the coarse mode is 5nm and that in the fine mode is 0.2nm. In the ultra-fine mode, current positioning resolution is 25pm.For improving the performance of the tri-mode picometer positioning system, we devise an active aerostatic coupling, where the air film thickness on the thrust bearing surface is controlled by the active inherent restrictors (AIRs) and the thrust stiffness of the bearing can be infinite. Therefore, while isolating the lateral vibration from the TFD, the active aerostatic coupling operates as a rigid coupling. The active coupling can also be used as a fine positioning device.To conclude our research, we expect that the picometer order of positioning resolution will be realized in due course, and the technological knowledge obtained in this research will contribute to the improvement of the positioning technology for ultraprecision machine tools.

针对下一代超精密机床，提出了三模皮米定位系统。定位系统具有粗、精、超精三种定位模式。长行程纳米定位的粗调模式由扭转滚子摩擦驱动（TFD）机构和普通交流伺服电机执行。亚纳米定位的精细模式也由扭转滚轮摩擦驱动机构执行，但该机构由压电致动器驱动。超精细模式采用内置于空气静压导轨中的主动固有限流器（AIR）实现皮米级定位。两个三模定位单元垂直排列，定位系统的每个模式均由带有微电脑的DSP（运动控制器）控制。测得的定位分辨率在粗略模式下为5nm，在精细模式下为0.2nm。在超精细模式下，当前定位分辨率为25pm。为了提高三模皮米定位系统的性能，我们设计了一种主动空气静压耦合器，其中推力轴承表面的气膜厚度由主动固有限流器（AIR）控制，轴承的推力刚度可以是无穷大。因此，在隔离 TFD 的横向振动的同时，主动空气静力联轴器作为刚性联轴器运行。主动联轴器还可以用作精细定位装置。总结我们的研究，我们期望在适当的时候能够实现皮米量级的定位分辨率，并且本研究中获得的技术知识将有助于超精密机床定位技术的改进。