Development of Picometer Positioning System and its Application for Ultraprecision Machining

皮米定位系统的研制及其在超精密加工中的应用

基本信息

批准号：
15360071
负责人：
MIZUMOTO Hiroshi
金额：
$ 9.86万
依托单位：
Tottori University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

For ultraprecision machine tool of the next generation, a tri-mode picometer positioning system is proposed. The positioning system has three positioning modes, namely coarse, fine and ultra-fine mode. The coarse mode for nanometer positioning with long stroke is executed by a twist-roller friction drive (TFD) mechanism and an ordinary AC servomotor. The fine mode for sub-nanometer positioning is also executed by the twist-roller friction drive mechanism, however the mechanism is driven by a piezoelectric actuator. The ultra-fine mode using an active inherent restrictor (AIR) incorporated into the aerostatic guideway realizes the picometer positioning.Two tri-mode positioning units are arranged in perpendicular, and each mode of the positioning system is controlled by a DSP (motion controller) with a microcomputer. Measured positioning resolution in the coarse mode is 5nm and that in the fine mode is 0.2nm. In the ultra-fine mode, current positioning resolution is 25pm.For improving the performance of the tri-mode picometer positioning system, we devise an active aerostatic coupling, where the air film thickness on the thrust bearing surface is controlled by the active inherent restrictors (AIRs) and the thrust stiffness of the bearing can be infinite. Therefore, while isolating the lateral vibration from the TFD, the active aerostatic coupling operates as a rigid coupling. The active coupling can also be used as a fine positioning device.To conclude our research, we expect that the picometer order of positioning resolution will be realized in due course, and the technological knowledge obtained in this research will contribute to the improvement of the positioning technology for ultraprecision machine tools.

对于下一代的超重新计算机机，提出了三模式图表的定位系统。定位系统具有三种定位模式，即粗略，细和超细模式。用长冲程的纳米定位的粗模式通过扭动摩擦驱动器（TFD）机构和普通的AC伺服电机执行。扭动摩擦驱动机制也执行了子纳米定位的良好模式，但是该机构是由压电电执行器驱动的。使用活跃的固有限制器（空气）纳入空气静态导向的超细节模式，实现了生态表的定位。两个三模式定位单元在垂直方向上排列，并且定位系统的每种模式都由DSP（运动控制器）用微型计算机控制。在粗模式下测得的定位分辨率为5nm，在罚款模式下为0.2nm。在超细模式下，当前的定位分辨率为25 pm。为了改善三模式图表的定位系统的性能，我们设计了一种主动的空气耦合，在该耦合中，推力轴承表面上的空气膜厚度由主动固有限制器（空气）控制，并且轴承的推力刚度是无限的。因此，在从TFD中隔离横向振动时，主动空气耦合作为刚性耦合。积极的耦合也可以用作良好的定位设备。若要结论我们的研究，我们希望在适当的时候实现定位分辨率的图表顺序，这项研究中获得的技术知识将有助于改善超级票据机械工具的定位技术。