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Evaluation of tribological properties of thin hard coatings by a slurry jet erosion test and its application to surface processing

通过浆料喷射侵蚀试验评估薄硬涂层的摩擦学性能及其在表面加工中的应用

基本信息

批准号：
15360083
负责人：
IWAI Yoshiro
金额：
$ 7.36万
依托单位：
University of Fukui
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

We proposed slurry jet, a new type of solid particle erosion test, in order to quickly evaluate tribological properties of thin hard coatings. The slurry jet with 1μm alumina particles were impacted at high velocity perpendicular to thin PVD coatings.(1) The TiN deposited under the highest substrate temperature proved to have the highest wear resistance although it had a relatively low hardness, The wear rate varies with the TiN grain orientation, i.e. the {111} orientation shows higher wear resistance than the {100}, which correlates to a correspondingly higher cleavage fracture resistance within each grains.(2) The ranking of MSE wear resistance for CrN deposited by different conditions show good correlation to their ratio of micro hardness to elastic modulus (H/E).(3) For the TiN/TiCN coating, the wear rate of TiN of the TiN/TiCN coating coincided to that of the singlelayerd TiN. However, TiN/TiCN coatings by the different deposition system showed discontinuous wear curves which were characterized by TiN, TiCN coatings and their interface. The differences in the wear properties between the coatings may be caused by the original surface morphology.(4) We set up a new type of MSE test apparatus (pot type tests) which can obtain the wear volume per unit weight of erodent. As a result, it generates reproducible results.(5) The ranking of wear resistance among the various coatings was compared with those obtained by other coating evaluation tests such as micro abrasion test.As a result, our proposed micro slurry jet erosion (MSE) test proved to be very useful as a screening test when evaluating the properties of hard thin coatings. In addition, we tried to produce the surface textures of the glass surface by our MSE method and the possibility of processing was concluded.

为了快速评价薄硬涂层的摩擦学性能，提出了一种新型的固体颗粒冲蚀磨损试验--浆体射流试验。将1μm氧化铝颗粒的浆料射流以垂直于薄PVD涂层的高速撞击。(1)在最高衬底温度下沉积的TiN尽管硬度相对较低，但耐磨性最高，磨损率随TiN晶粒取向而变化，即{111}取向比{100}取向显示出更高的耐磨性，这与每个晶粒内相应较高的解理断裂阻力相关。(2)不同条件下沉积的CrN的MSE耐磨性排序与其显微硬度与弹性模量之比（H/E）有很好的相关性。(3)对于TiN/TiCN涂层，TiN/TiCN涂层的TiN的磨损率与单层TiN的磨损率一致。而不同沉积体系的TiN/TiCN涂层的磨损曲线呈现出不连续的特征，其特征在于TiN、TiCN涂层及其界面。涂层之间磨损性能的差异可能是由原始表面形貌引起的。(4)建立了一种新型的MSE试验装置（罐式试验），该装置可以获得单位重量腐蚀剂的磨损体积。因此，它产生了可重复的结果。(5)各种涂层之间的耐磨性的排名进行了比较，通过其他涂层评价测试，如microabrasion test.As结果，我们提出的微浆射流侵蚀（MSE）测试被证明是非常有用的筛选测试时，评价硬薄涂层的性能。此外，我们还尝试用MSE方法制作玻璃表面的表面纹理，并得出加工的可能性。