Development of high-frequency scanning near-field microscopy and investigation of its applications

衍射效应将传统成像显微镜的分辨率限制在所使用的辐射波长左右。然而，低于衍射极限的亚波长分辨率可以通过扫描近场显微镜技术来实现。本研究项目的目标是在毫米波和太赫兹区域开发新的显微镜格式及其相关技术，这与我们使用主要在毫米波区域开发的金属狭缝型探针的原始显微镜系统有关，提出并实验验证了近距离扫描技术在毫米波和太赫兹显微镜中的应用。场各向异性显微镜在毫米波区域，允许观察的对象中的电各向异性。我们还提出了一种被动显微镜格式，使完全非破坏性和非侵入性的测量，并成功地实验证明其图像重建， ...更多信息 在毫米波区域中是最简单的。为了提高狭缝探针的测量灵敏度，我们提出、设计并制作了一种用于毫米波显微镜的共振狭缝探针。在毫米波区域进行的实验表明，谐振探针具有超过十倍的灵敏度比传统的锥形狭缝型probes.To证明太赫兹显微镜使用狭缝型probes，我们试图优化的几何形状的锥形狭缝探针操作在太赫兹频段为0.3太赫兹。基于优化过程中得到的设计准则，采用电铸技术制作了锥形狭缝探针。我们已经验证了探针的测量RF性能与使用有限元方法得到的预测一致。我们已经将上述显微镜格式和技术应用于表征平面介质基板，液晶材料等。在毫米波区域。实验验证了它们的有效性。少

Diffraction effects limit the resolution of conventional imaging microscopes to about the radiation wavelength used. However, sub-wavelength resolution below the diffraction limit can be achieved by the technique of scanning near-filed microscopy. The objective of this research project is to develop new microscopy formats and their related technologies in the millimeter-wave and terahertz regions in regard to our original microscope system using a metal slit-type probe that we had developed mainly in the millimeter-wave region, and to investigate new applications of the millimeter-wave and terahertz microscopy.We have proposed and experimentally demonstrated scanning near-field anisotropy microscopy in the millimeter-wave region, permitting the observation of electrical anisotropy in the viewed object. We also proposed a passive microscopy format that enables completely non-destructive and non-invasive measurements and succeeded to experimentally demonstrate its image reconstruction pr … More inciple in the millimeter-wave region. In order to improve measurement sensitivity of the slit probe, we have proposed, designed and fabricated a resonant slit-type probe for millimeter-wave microscopy. Experiments performed in the millimeter-wave region show that the resonant probe has more than ten times greater sensitivity than a conventional tapered slit-type probe.To demonstrate terahertz microscopy using a slit-type probe, we have tried to optimize the geometry of the tapered slit probe operated at a terahertz frequency band of 0.3 THz. Based on the design criteria derived from the optimization process, a tapered slit probe was fabricated by electro-forming technique. We have verified that the measured RF performance of the probe agrees well with the predicted one obtained using the finite element method.We have applied the above mentioned microscopy formats and technologies to the characterization of planar dielectric substrates, liquid crystal materials etc. in the millimeter-wave region. Effectiveness of them has been experimentally verified. Less