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Analysis of dynamics of particles suspended in non-equilibrium rf plasma space

非平衡射频等离子体空间中悬浮粒子的动力学分析

基本信息

批准号：
15360413
负责人：
SHIMADA Manabu
金额：
$ 9.28万
依托单位：
HIR0SHIMA UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15360413/
关键词：
plasma dust process plasma low-temperature-plasma enhanced CVD aerosol dynamics coagulational growth particle charging laser light scatterine measurement transport and deposition control エアロゾル荷電

项目摘要

The purpose of this study has been to understand the growth processes and transport phenomena of fine particles generated in a non-equilibrium plasma field by measuring the properties and motion of the particles. The research results in the research period are summarized as follows.1.Detailed measurements of the spatial distribution of fine particles in plasma was made possible by installing an in-line particle measurement system in a plasma reactor equipped with an in situ laser light scattering measurement system. The range of the measurable size and concentration of particles was determined by using test particles. The properties of fine particles could be measured for those generated in the plasma CVD processes for thin film fabrication of SiO_2 and Si. The transport and deposition behavior and trapping phenomena of fine particles suspended in plasma and post-plasma fields could be evaluated by visualization of the particles.2.The spatial distribution of several parameters characterizing a plasma field was obtained by measurements using plasma measurement devices and numerical simulation. Theoretical models for describing the processes of particle charging and coagulation were derived by considering the above parameters. Particle behavior predicted with the models was found to agree satisfactorily with measured results.3.A numerical simulator was prepared by deriving a particle transport model based on the various forces acting on charged fine particles in plasma. The model and the simulator were validated with measured results. A technique for controlling the transport of fine particles in plasma was also proposed and its efficiency was verified by building an actual device based on the technique.4.The model for coagulational growth of fine particles in plasma was analyzed in conjunction with the particle transport model, which made clear the mechanisms governing the size of fine particles generated in plasma.

本研究的目的是通过测量粒子的性质和运动来了解非平衡等离子体场中产生的细粒子的生长过程和输运现象。主要研究成果如下：1.通过在等离子体反应器中安装在线粒子测量系统，实现了对等离子体中细粒子空间分布的详细测量。通过使用测试颗粒来确定颗粒的可测量尺寸和浓度的范围。在等离子体CVD制备SiO_2和Si薄膜过程中产生的细小颗粒的性质可以测量。通过粒子的可视化，可以对悬浮在等离子体和等离子体后场中的微粒的输运、沉积行为和捕获现象进行评价。2.通过等离子体测量装置的测量和数值模拟，获得了表征等离子体场的几个参数的空间分布。通过考虑上述参数，推导出了描述颗粒荷电和凝聚过程的理论模型。利用粒子输运模型对等离子体中带电粒子的行为进行了预测，结果与实验结果吻合较好。3.根据等离子体中带电粒子所受的各种作用力，建立了粒子输运模型，并编制了数值模拟程序。模型和模拟器与实测结果进行了验证。提出了一种控制等离子体中细颗粒输运的技术，并通过搭建实际装置验证了该技术的有效性。4.结合颗粒输运模型，分析了等离子体中细颗粒的凝聚生长模型，阐明了等离子体中细颗粒尺寸的控制机理。