PREPARATION OF FILMS WITH NANO POROUS STRUCTURES BY GAS-PHASE PLASMA SYNTHESIS AND TRANSPORT CONTROL OF HIGHLY-DISPERSED NANOPARTICLES

具有纳米尺度水平的孔的薄膜被期望显示有用的功能。在这项研究中，我们的目的是开发一种新的气相工艺制备这种多孔膜。实验研究了颗粒在气体中的合成及其在衬底上的传输和沉积。发现通过使用非团聚的纳米颗粒制备具有均匀纳米多孔结构的膜。研究了颗粒尺寸、团聚、沉积条件和热处理对多孔薄膜的影响，为多孔薄膜的制备提供了控制方向

Thin films having pores at a nano scale level are expected to show useful functions. In this study, we aimed at developing a novel gas-phase process for preparing such porous films. The particle synthesis in gas followed by their transport to and deposition on a substrate was experimentally investigated. Films with a uniform nano porous structure were found to be prepared by using non-agglomerated nanoparticles. The effects of particle size and agglomeration, deposition conditions, and heat treatment to the films were also clarified, leading to obtaining the directions for controlling the preparation of porous films