Development of processing tool using carbon nanotube

在这项研究中，我们提出了一种使用碳纳米管的多功能纳米加工工具，该工具由纳米管灯丝和纳米级气体供应喷嘴组成。纳米工具使我们能够加工纳米级材料。我们不仅成功地将环形纳米管连接到光纤尖端，而且还成功地将直径约500 nm的气体喷嘴连接到纳米管上。该装置可作为带气源的纳米热源。为了研究纳米管的发光特性，在纳米工厂中安装了一个由冷却InGaAs二极管阵列和单色仪组成的光学测量系统。这使我们能够测量单个纳米管在近红外区域的发光。利用InGaAs探测器和纳米管白炽灯成功地测量了光纤中-OH碱的吸收光谱。测量了长度为1 μm的纳米管在最高温度下的导热系数为300 W/m-K。当纳米管长度小于1 μm时，热导率对纳米管长度的依赖性更强。这种现象归因于声子平均自由程受纳米管长度的限制。完成了纳米白炽灯非接触式原子力显微系统的构建。采用常规醇基CVD系统，研究了局域CVD反应的催化剂。最佳催化剂为Co/Mo混合物。利用由纳米管组成的场效应管对纳米管的电子性能进行了评价。为了验证气体导入方法，将室温下易升华的W(CO)6引入腔室，通过电子束分解，在纳米管末端沉积W相关化合物。我们用电子束诱导沉积法测量了尺寸小于100nm的纳米材料的质量。利用纳米管白炽灯，在1000℃的工作温度下，用电子束诱导沉积法制备了一种非晶态碳沉积。少

In this research, we have proposed a multifunctional nano-processing tool using carbon nanotubes, which consists of a nanotube filament with an nanoscale nozzle for gas supply. The nano-tool enables us to process the nanoscale materials.1.We have succeeded in nanotube attachment of the loop shape to not only an optical fiber tip but also the gas nozzle with a diameter of 〜500 nm. This device can be used as a nano heat source with gas supply.In order to investigate the light emission of the nanotube, an optical measurement system, which consisted of a cooled InGaAs diode array and a monochromator, was installed in the nanofactory. This enabled us to measure a luminescence in the near IR region from individual nanotubes. The absorption spectra of -OH base in the optical fiber have been successfully measured using the InGaAs detector and the nanotube incandescent lamp.Thermal conductivity for a nanotube with the length of 1 μm was measured to be 300 W/m-K from the maximum temperature. Len … More gth dependence of the thermal conductivity was found at the condition of the nanotube length less than 1 μm. This phenomenon is attributed to the phonon mean free path limited by the nanotube length.2.We have completed a construction of non-contact atomic force microscopy system for the nano-incandescent lamp.3.Catalysts for the localized CVD have been investigated by the conventional alcohol CVD system. The optimum catalyst was Co/Mo mixture. The electronic property of the nanotubes were evaluated by FETs consisting of the nanotube. In order to check the introducing method of gases to the chamber, W(CO)6, which is sublimated easily at room temperature, has been introduced into the chamber and decomposed by the electron beam to deposit a W related compounds on the nanotube's end. We have measured the mass of nano-materials with the size less than 100 nm deposited by an electron beam induced deposition method.4.An amorphous carbon deposit, which was synthesized by an electron beam induced deposition has been processed by the nanotube incandescent lamp with an operation temperature at 1000 ℃. Less