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Development of processing tool using carbon nanotube

使用碳纳米管的加工工具的开发

基本信息

批准号：
16310090
负责人：
AKITA Seiji
金额：
$ 10.11万
依托单位：
Osaka Prefecture University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

In this research, we have proposed a multifunctional nano-processing tool using carbon nanotubes, which consists of a nanotube filament with an nanoscale nozzle for gas supply. The nano-tool enables us to process the nanoscale materials.1.We have succeeded in nanotube attachment of the loop shape to not only an optical fiber tip but also the gas nozzle with a diameter of 〜500 nm. This device can be used as a nano heat source with gas supply.In order to investigate the light emission of the nanotube, an optical measurement system, which consisted of a cooled InGaAs diode array and a monochromator, was installed in the nanofactory. This enabled us to measure a luminescence in the near IR region from individual nanotubes. The absorption spectra of -OH base in the optical fiber have been successfully measured using the InGaAs detector and the nanotube incandescent lamp.Thermal conductivity for a nanotube with the length of 1 μm was measured to be 300 W/m-K from the maximum temperature. Len … More gth dependence of the thermal conductivity was found at the condition of the nanotube length less than 1 μm. This phenomenon is attributed to the phonon mean free path limited by the nanotube length.2.We have completed a construction of non-contact atomic force microscopy system for the nano-incandescent lamp.3.Catalysts for the localized CVD have been investigated by the conventional alcohol CVD system. The optimum catalyst was Co/Mo mixture. The electronic property of the nanotubes were evaluated by FETs consisting of the nanotube. In order to check the introducing method of gases to the chamber, W(CO)6, which is sublimated easily at room temperature, has been introduced into the chamber and decomposed by the electron beam to deposit a W related compounds on the nanotube's end. We have measured the mass of nano-materials with the size less than 100 nm deposited by an electron beam induced deposition method.4.An amorphous carbon deposit, which was synthesized by an electron beam induced deposition has been processed by the nanotube incandescent lamp with an operation temperature at 1000 ℃. Less

在这项研究中，我们提出了一个多功能的纳米加工工具，使用碳纳米管，它由一个纳米级的气体供应喷嘴的纳米管丝。该纳米工具使我们能够加工纳米级材料。1.我们成功地将环形纳米管附着到光纤尖端和直径为500 nm的气体喷嘴上。为了研究纳米管的发光特性，在纳米工厂中安装了一个由InGaAs二极管阵列和单色器组成的光学测量系统。这使我们能够测量单个纳米管在近红外区域的发光。用InGaAs探测器和纳米管白炽灯成功地测量了光纤中-OH基的吸收光谱，测得1 μm长的纳米管的热导率从最高温度开始为300 W/m-K。透镜 ...更多信息当碳纳米管长度小于1 μm时，热导率随gth的变化规律明显.这一现象归因于声子平均自由程受到纳米管长度的限制。2.我们完成了纳米白炽灯的非接触原子力显微镜系统的构建。最佳催化剂为Co/Mo混合物。利用由纳米管组成的场效应管对纳米管的电学性质进行了测试。为了检查将气体引入到腔室中的方法，将在室温下容易升华的W（CO）6引入到腔室中并通过电子束分解以在纳米管的端部上存款W相关化合物。测量了电子束诱导沉积法制备的尺寸小于100 nm的纳米材料的质量。4.用工作温度为1000 ℃的纳米管白炽灯对电子束诱导沉积法制备的非晶碳存款层进行了加工。少