Study on Solid Lubricant Films adapted for Both Environment of Vacuum and Air Atmosphere by Prevention of Galvanic Corrosion and Strengthening of Bonding Layer
防止电偶腐蚀和强化结合层适应真空和大气环境的固体润滑膜的研究
基本信息
- 批准号:16360081
- 负责人:
- 金额:$ 9.86万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (B)
- 财政年份:2004
- 资助国家:日本
- 起止时间:2004 至 2005
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Molybdenum disulfide films with various densities have been prepared on SUS440C steel substrate by radio frequency sputter deposition. Films were stored in air atmospheres of 30% relative humidity. The effects of storage period on the wear life in air atmospheres of 9% relative humidity have been investigated using newly developed testing device. The variety in the wear life was divided into two patterns for density. The wear life of films with the density under 3.7g/cm^3 decreases with the storage period. As the density was smaller, the storage period until the wear life began to drop became shorter. On the other hand, for the film with a density of 4.3g/cm^3, the wear life increases and then decreases by the storage in air. It was found by the SIMS analysis that the oxygen in the film near film/substrate interface increases as the storage period extends.It was also found that the relationship between the wear life and film thickness depends on the crystalline orientation of sputtered molybdenum disulfide. In the case for the films with the density over 3.7g/cm^3, the wear life is scarcely influenced by the film thickness since the detachment of the film occurs readily ; the C axis of molybdenum disulfide crystal is fast oriented perpendicular or oblique direction to the substrate surface. On the other hand, for the film with a density under 2.7g/cm^3, the wear life increases with the film thickness ; the C axis is weakly oriented perpendicular or oblique direction to the substrate surface. That is, the adhesion strength of the film is strongly related to the crystalline orientation of sputtered molybdenum disulfide.On the basis of the results mentioned above, new film structure to endure the storage in air atmospheres and having a longer wear life was proposed.
采用射频溅射沉积法在SUS 440 C钢基体上制备了不同密度的二硫化钼薄膜。将膜储存在30%相对湿度的空气气氛中。采用新研制的试验装置,研究了在相对湿度为9%的空气中贮存时间对耐磨寿命的影响。密度的变化将磨损寿命的变化分为两种模式。密度小于3.7g/cm ^3的薄膜磨损寿命随贮存时间的延长而降低。随着密度的减小,直到磨损寿命开始下降的储存期变短。而密度为4.3g/cm ^3的薄膜在空气中贮存后,磨损寿命先增加后降低。西姆斯分析发现,随着贮存时间的延长,膜/基界面附近的膜中氧含量增加,磨损寿命与膜厚的关系取决于溅射二硫化钼的晶向。密度大于3.7g/cm ^3的薄膜,由于薄膜容易脱落,磨损寿命几乎不受薄膜厚度的影响,二硫化钼晶体的C轴快速垂直或倾斜于基体表面取向。而密度小于2.7g/cm ^3的薄膜,其磨损寿命随薄膜厚度的增加而增加,C轴取向较弱地垂直于或倾斜于基体表面。在此基础上,提出了一种新的耐大气贮存、具有较长磨损寿命的薄膜结构。
项目成果
期刊论文数量(5)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
反応性スパッタ法でローラ上に形成したMo-S-O膜の酸素含有量と潤滑特性の関係
反应溅射辊上Mo-S-O薄膜氧含量与润滑性能的关系
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:小熊清典;池田満昭;砂原賢治;松田健次;兼田禎宏
- 通讯作者:兼田禎宏
Wear Life of MoS_2 Films Sputtered onto SUS440C Rollers - The Relation between Film Density and Effect of Storage Period in Air on Wear Life -
SUS440C 辊上溅射 MoS_2 薄膜的磨损寿命 - 薄膜密度与空气中储存时间对磨损寿命影响的关系 -
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:砂原賢治;池田満昭;松田健次;兼田〓宏;Kenji SUNAHARA
- 通讯作者:Kenji SUNAHARA
ローラに被覆した二硫化モリブデンスパッタ膜の寿命に及ぼす結晶配向性の影響
晶体取向对辊上二硫化钼溅射薄膜寿命的影响
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:砂原賢治;池田満昭;松田健次;兼田〓宏
- 通讯作者:兼田〓宏
SUS440C製ローラに被覆したMoS2スパッタ膜の摩擦寿命-膜密度と空気中保管の摩擦寿命への影響-
SUS440C辊上MoS2溅射薄膜的摩擦寿命 - 薄膜密度和空气中储存对摩擦寿命的影响 -
- DOI:
- 发表时间:2005
- 期刊:
- 影响因子:0
- 作者:小熊清典;池田満昭;砂原賢治;松田健次;兼田〓宏
- 通讯作者:兼田〓宏
二硫化モリブデンスパッタ膜の性状に及ぼすアルゴン分圧の影響
氩分压对二硫化钼溅射薄膜性能的影响
- DOI:
- 发表时间:2004
- 期刊:
- 影响因子:0
- 作者:砂原賢治;池田満昭;村岡善之;松田健次;兼田〓宏
- 通讯作者:兼田〓宏
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MATSUDA Kenji其他文献
MATSUDA Kenji的其他文献
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