A Study on a New Method to Measure Electron Energy Distribution in High Frequency Plasmas

高频等离子体中电子能量分布测量新方法的研究

基本信息

  • 批准号:
    18540496
  • 负责人:
  • 金额:
    $ 2.48万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
  • 财政年份:
    2006
  • 资助国家:
    日本
  • 起止时间:
    2006 至 2007
  • 项目状态:
    已结题

项目摘要

A new method to measure electron temperature and electron energy distribution function by an emissive probe has been proposed. The method is based on measurement of the functional relationship between the floating potential and the heating voltage of emissive probe. From the measured data of the floating potential change as a function of the heating voltage, the electron temperature could be determined by comparing with the theoretical curve obtained under the assumption of Maxwellian distribution. The overall characteristic of the floating potential change could be explained as a function of the heating voltage. The electron temperatures obtained by the present method were consistent with those measured by the rf-compensated Langmuir probe within the error, These experimental verifications were made in the electron density range of 2.6×10^<11>-2.8×10^<12> cm^<-3> in an inductively coupled plasma of Ar.In this study, a prototype of the diagnostic tool based on the present method was developed in a computer-aided fashion. The method was also applied to a SF_6 etching plasma which was produced in ceramic discharge tubes by surface-wave with the frequencies of 13.56 and 60 MHz. In this experiment, the Renium filament was employed, and the erectron energy as well as the potentials were measured in SF_6 plasma. These data were found to be consistent with the Si ecth rate obtained in the SF_6 plasma. It was stressed that the present method was advantageous in that the probe is operated in a floating condition, hence applicable to plasmas produced in an insulated container. The electron energy distribution function was also obtained in. SF_6 etching plasma which was produced in ceramic discharge tubes by surface-wave.
提出了一种用发射探针测量电子温度和电子能量分布函数的新方法。该方法是基于测量的浮动电位和发射探针的加热电压之间的函数关系。由浮置电位随加热电压变化的实测数据,与麦克斯韦分布假设下的理论曲线相比较,可以确定电子温度。浮置电势变化的总体特性可以解释为加热电压的函数。在2.6×10^<11>-2.8 × 10 ^<12>cm^-1<-3>的Ar感应耦合等离子体电子密度范围内进行了实验验证。该方法也被应用于SF_6陶瓷放电管中的SF_6刻蚀等离子体,该等离子体是由频率为13.56和60 MHz的表面波产生的。本实验采用Renium灯丝,测量了SF_6等离子体中的正电子能量和正电子电势。这些数据与在SF_6等离子体中测得的硅化率一致。强调了本方法的优点在于探针在浮动条件下操作,因此适用于在绝缘容器中产生的等离子体。电子能量分布函数也得到了。利用表面波在陶瓷放电管中产生SF_6等离子体。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
高周波プラズマ診断におけるエミッシブプローブ特性解析
高频等离子体诊断中的发射探针特性分析
エミッシブプローブによる高誘電率放電管内のSF_6プラズマ診断とSiエッチング特性
利用发射探针和硅刻蚀特性对高介电常数放电管中的SF_6等离子体进行诊断
  • DOI:
  • 发表时间:
    2008
  • 期刊:
  • 影响因子:
    0
  • 作者:
    草場 康太;進藤 春雄
  • 通讯作者:
    進藤 春雄
エミッシブプローブ法による誘導結合型プラズマ特性診断
使用发射探针法的电感耦合等离子体特性诊断
  • DOI:
  • 发表时间:
    2008
  • 期刊:
  • 影响因子:
    0
  • 作者:
    草場 康太;進藤 春雄
  • 通讯作者:
    進藤 春雄
A New Diagnostic Method of Very-Frequency Plasmas Produced in Insulated Vessels
绝缘容器中产生的高频等离子体的一种新诊断方法
  • DOI:
  • 发表时间:
    2007
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Kouta;Kusaba;Haruo;Shindo;Haruo Shindo and Kouta Kusaba
  • 通讯作者:
    Haruo Shindo and Kouta Kusaba
A new emissive-probe method for electron temperature measurement in radio-frequency plasmas
一种用于射频等离子体中电子温度测量的新型发射探针方法
  • DOI:
  • 发表时间:
    2007
  • 期刊:
  • 影响因子:
    0
  • 作者:
    樋田美栄子;吉谷嵩志;大澤幸治;Kouta Kusaba and Haruo Shindo
  • 通讯作者:
    Kouta Kusaba and Haruo Shindo
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SHINDO Haruo其他文献

SHINDO Haruo的其他文献

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{{ truncateString('SHINDO Haruo', 18)}}的其他基金

Research on Large-Scaled Line Plasma Production by Microwave
微波大规模生产线等离子体的研究
  • 批准号:
    20540486
  • 财政年份:
    2008
  • 资助金额:
    $ 2.48万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Negative Ion Silicon Oxidation in Oxygen Plasma with High Rate and Low Damage.
氧等离子体中负离子硅氧化高速率、低损伤。
  • 批准号:
    11680490
  • 财政年份:
    1999
  • 资助金额:
    $ 2.48万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Role of various inorganic components and enzymes in the formation of humic substances
各种无机成分和酶在腐殖质形成中的作用
  • 批准号:
    63560066
  • 财政年份:
    1988
  • 资助金额:
    $ 2.48万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
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