Fabrication of SiC Film with Ultra-low Friction Coefficient and Evaluation of Friction Property and Delamination Strength

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In order to fabricate Sic film having ultra low friction coefficient, the following experiments were carried out:1. New target was added to helicon sputtering apparatus(MPS-3000-HC, ULVAC), enabling simultaneous sputtering of SiC target and two metal targets. Sputtering rate of Ti, Al and Ta targets was evaluated by using the helicon sputtering apparatus.2. Friction and wear properties of the SC film were measured by using a pin-on-disk type friction and wear testing machine. The result showed that the friction coefficient decreased with increasing number of rotation cycles, and reaches a minimum value of 0.04.3. In order to clarify the influence of wear debris produced during repeating sliding on wear scar on friction coefficient, the wear test was interrupted by ultrasonic cleaning. The result showed that the wear powders act as solid lubricant and decrease the friction coefficient4. To evaluate the delamination strength of SiC film, cyclic indentation tests were carried out on TiN or SiC film sputter-coated on titanium or tool steel substrate by using a Rockwell C-scale indenter, and delamination behavior of the films was investigated. The result showed that the Sic film was delaminated by repeating indentation. It was concluded that more research regarding improvement of the delamination strength of the SiC film was required.