Fabrication of SiC Film with Ultra-low Friction Coefficient and Evaluation of Friction Property and Delamination Strength

超低摩擦系数SiC薄膜的制备及摩擦性能和剥离强度评价

• 批准号: 18560134
• 负责人: KATO Masahiko
• 金额: $ 2.4万
• 依托单位: Hiroshima University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560134/
• 关键词: SiC; Souttering; Friction and wear

In order to fabricate Sic film having ultra low friction coefficient, the following experiments were carried out:1. New target was added to helicon sputtering apparatus(MPS-3000-HC, ULVAC), enabling simultaneous sputtering of SiC target and two metal targets. Sputtering rate of Ti, Al and Ta targets was evaluated by using the helicon sputtering apparatus.2. Friction and wear properties of the SC film were measured by using a pin-on-disk type friction and wear testing machine. The result showed that the friction coefficient decreased with increasing number of rotation cycles, and reaches a minimum value of 0.04.3. In order to clarify the influence of wear debris produced during repeating sliding on wear scar on friction coefficient, the wear test was interrupted by ultrasonic cleaning. The result showed that the wear powders act as solid lubricant and decrease the friction coefficient4. To evaluate the delamination strength of SiC film, cyclic indentation tests were carried out on TiN or SiC film sputter-coated on titanium or tool steel substrate by using a Rockwell C-scale indenter, and delamination behavior of the films was investigated. The result showed that the Sic film was delaminated by repeating indentation. It was concluded that more research regarding improvement of the delamination strength of the SiC film was required.

为了制备具有超低摩擦系数的SiC薄膜，进行了以下实验：1。在螺旋溅射装置（MPS-3000-HC，ULVAC）中添加了新的靶，能够同时溅射SiC靶和两个金属靶。使用螺旋溅射装置评估了Ti、Al和Ta靶的溅射速率。2.采用销盘式摩擦磨损试验机测试了SC膜的摩擦磨损性能。结果表明，摩擦系数随旋转次数的增加而减小，最小值为0.04.3。为了明确磨损过程中产生的磨屑对磨痕摩擦系数的影响，采用超声波清洗中断磨损试验。结果表明，磨损粉末起到了固体润滑剂的作用，降低了摩擦系数。为了评价SiC薄膜的分层强度，采用洛氏C级压痕仪对钛和工具钢基体上镀TiN或SiC薄膜的分层行为进行了循环压痕试验。结果表明，SiC薄膜是通过反复压痕而分层的。因此，需要进一步研究提高SiC薄膜的剥离强度。

项目成果

Influence of Elements addition on Friction and Wear properties of SiC Film Coated by Helicon Sputtering

元素添加对螺旋溅射SiC薄膜摩擦磨损性能的影响

• 发表时间: 2008
• 作者: S.;Iwasaki;H.;Akebono;M.;Kato;A.;Sugeta
• 通讯作者: Sugeta

Evaluation of Delamination Characteristics of TIN and SiC Sputtered Thin Films by Cyclic Indentation under Load Control

负载控制下循环压痕评价 TIN 和 SiC 溅射薄膜的分层特性

• 期刊: Journal of Materials Science, Japan (In Press)
• 作者: Masahiko;KATO;Keijiro;NAKASA;Ming;LI;Bo;ZHANG
• 通讯作者: ZHANG

荷重制御下の繰返し圧子押込みによるTiNおよびSiCスパッタ薄膜のはく離特性評価

负载控制下重复压痕评价 TiN 和 SiC 溅射薄膜的剥离特性

• 发表时间: 2008
• 期刊: 材料 (掲載決定)
• 作者: Yanada;H.;Tran;K;D.;Okamoto;T;赤上 陽一;加藤昌彦
• 通讯作者: 加藤昌彦

Wear and Delamination Behavior of SiC Thin Film under Repeated Sliding Load

重复滑动载荷下SiC薄膜的磨损和分层行为

• 发表时间: 2007
• 期刊: Key Engineering Materials 345-346
• 作者: K. Nakasa;M. Kato;J. Zheng
• 通讯作者: J. Zheng

ヘリコンスパッタSiC薄膜の摩擦・摩耗特性に及ぼす各種元素添加の影響

不同元素添加对螺旋溅射SiC薄膜摩擦磨损性能的影响

• 发表时间: 2008
• 作者: 岩崎智史;曙 紘之;加藤昌彦;菅田 淳
• 通讯作者: 菅田 淳