Increase in Adhesion Strength of SiC Film with Super Low Friction Coefficient by Formation Technique of Nano-precipitates at Interface

通过界面纳米析出物形成技术提高超低摩擦系数SiC薄膜的附着强度

• 批准号: 20560134
• 负责人: KATO Masahiko
• 金额: $ 2.91万
• 依托单位: Hiroshima University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20560134/
• 关键词: SiC薄膜; はく離強度; 界面制御; アンカー効果; 微細円錐突起物; SiC; スパッタ; はく離エネルギ; 微細円錐状突起物

In this research, improvement of delamination strength of sputtered film was attempted by utilizing an anchor effect of fine conical precipitates formed at interface. Fine conical precipitates were formed on a tool steel substrate (JIS : SKH51) by sputter etching treatment under various conditions, and the relationship between the etching condition and shape of the precipitates was investigated. The result showed that height and radius of the precipitates was controllable by etching time, power, and pressure. The delamination strength of the amorphous SiC film formed on the substrates with fine conical precipitates using helicon sputtering apparatus was measured by micro edge-indent method. The delamination strength of the SiC film varied with the size and density of the precipitates, and exceeded that of un-etched specimens, when appropriate size precipitates were formed on the substrate.

在本研究中，尝试利用界面处形成的细小圆锥形析出物的锚固效应来提高溅射膜的剥离强度。通过在各种条件下进行溅射蚀刻处理，在工具钢基材（JIS：SKH51）上形成细小的圆锥形析出物，并研究蚀刻条件与析出物形状之间的关系。结果表明，沉积物的高度和半径可以通过蚀刻时间、功率和压力来控制。采用微边压痕法测量了使用螺旋溅射装置在具有细小圆锥形析出物的基板上形成的非晶SiC膜的剥离强度。 SiC薄膜的剥离强度随析出物的尺寸和密度的变化而变化，当基体上形成适当尺寸的析出物时，SiC薄膜的剥离强度超过未蚀刻的样品。

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SiCスパッタ薄膜のはく離強度に及ぼす界面微細突起物の影響

界面细小突起对SiC溅射薄膜剥离强度的影响

• 发表时间: 2010
• 作者: 加藤昌彦;林真人;曙紘之;菅田淳
• 通讯作者: 菅田淳

マイクロエッジインデント法によるSiC薄膜のはく離強度評価および界面微細円錐状突起物がSiC薄膜のはく離強度に及ぼす影響

微边缘压痕法评价SiC薄膜剥离强度及界面细锥状突起对SiC薄膜剥离强度的影响

• 发表时间: 2008
• 作者: 井上吉弘;永田和也;山下新太郎;Takeshi Seta;加藤昌彦
• 通讯作者: 加藤昌彦

Effect of intermediate layer on wear-delamination life of low-frictional SiC-2.6mass%Ti film sputter-deposited on titanium substrate

效果%20of%20中间%20层%20on%20磨损分层%20life%20of%20低摩擦%20SiC-2.6mass%Ti%20film%20sputter-deposited%20on%20titanium%20substrate

• DOI: 10.1016/j.surfcoat.2010.09.051
• 发表时间: 2010
• 期刊: Surface & Coatings Technology
• 影响因子: 5.4
• 作者: J. Zheng;Masahiko Kato;K. Nakasa
• 通讯作者: K. Nakasa

Measurement of Delamination Energy of Sputtered SiC Film Coated on Tool Steel Substrate

工具钢基体上溅射SiC薄膜分层能的测量

• 发表时间: 2010
• 期刊: Journal of JSEM vol.10
• 作者: Masahiko KATO;Koumei FUJIOKA;Hiroyuki AKEBONO;Atsushi SUGETA
• 通讯作者: Atsushi SUGETA