Preparation of multiferroic thin film by low temperature vapor deposition

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Development of the multi-functional materials which have two or more functions has been required for a high integration, high functionality and energy saving of the next-generation device. In this research, it succeeded in preparation of the multi-functional materials thin films which have both magnetic and dielectric properties such as Y-Fe-O and Co-Nb_2O_5 thin film by chemical vapor deposition and RF sputtering methods. Furthermore, new Ir and Ru system oxide thin film of electrode for dielectric materials were produced.