Preparation of multiferroic thin film by low temperature vapor deposition

低温气相沉积制备多铁性薄膜

• 批准号: 19360292
• 负责人: MASUMOTO Hiroshi
• 金额: $ 12.9万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2007
• 资助国家: 日本
• 起止时间: 2007 至 2009
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19360292/
• 关键词: 酸化イットリウム鉄; コバルト-酸化ニオブ; ルテニウム酸化物; 誘電率; 磁性; 電気電導率; 薄膜; セラミックス; CVD; Y-Fe-O; 誘電体; 磁性体; 電極薄膜; チタン酸バリウム; 強誘電体; キュリー点

Development of the multi-functional materials which have two or more functions has been required for a high integration, high functionality and energy saving of the next-generation device. In this research, it succeeded in preparation of the multi-functional materials thin films which have both magnetic and dielectric properties such as Y-Fe-O and Co-Nb_2O_5 thin film by chemical vapor deposition and RF sputtering methods. Furthermore, new Ir and Ru system oxide thin film of electrode for dielectric materials were produced.

为实现下一代器件的高集成度、高功能性和节能化，需要开发具有两种或两种以上功能的多功能材料。本研究成功地采用化学气相沉积和射频溅射法制备了Y-Fe-O和Co-Nb_2O_5等兼具磁性和介电性能的多功能材料薄膜。此外，还制备了新型介电材料电极用Ir和Ru系氧化薄膜。

项目成果

Epitaxial growth of BaRuO_3 thin films on MgO substrates by laser ablation

激光烧蚀在MgO衬底上外延生长BaRuO_3薄膜

• 发表时间: 2009
• 期刊: JOURNAL OF THE CERAMIC SOCIETY OF JAPAN 117
• 作者: Ito;A; Masumoto;H; Goto;T; Sato;S
• 通讯作者: S

Characterization of alkaline earth metals ruthenate thin films

碱土金属钌酸盐薄膜的表征

• 发表时间: 2009
• 期刊: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 30
• 作者: Ito;A; Masumoto;H; Goto;T; Sato;S
• 通讯作者: S

Preparation of BaRuO_3 and BalrO_3 films by laser ablation

激光烧蚀法制备BaRuO_3和BalrO_3薄膜

• 发表时间: 2007
• 期刊: Key Eng.mater 336-338巻
• 作者: H. Masumoto;A. Ito;Y. Kaneko;T. Goto
• 通讯作者: T. Goto

Effect of composition on crystal phase and electrical property of Sr-Ir-O system prepared by SPS

成分对SPS制备Sr-Ir-O体系晶相和电性能的影响

• 发表时间: 2008
• 作者: T. Ohno;B. Malic;H. Fukazawa;N. Wakiya;H. Suzuki;T. Matsuda;M. Kosec;Nittaya Keawprak-Rong Tu-Takashi Goto
• 通讯作者: Nittaya Keawprak-Rong Tu-Takashi Goto

Structural and optical properties of BaTi2O5 thin films prepared by pulsed laser deposition at different substrate temperatures

• DOI: 10.1016/j.matchemphys.2008.07.048
• 发表时间: 2009-01
• 期刊: Materials Chemistry and Physics
• 影响因子: 4.6
• 作者: C. B. Wang;R. Tu;T. Goto;Q. Shen;Lianmeng Zhang