X-Ray Photon Correlation Spectroscopy Study of Crystal Growth Dynamics

晶体生长动力学的 X 射线光子相关光谱研究

• 批准号: 19560030
• 负责人: TAKAHASHI Masamitsu
• 金额: $ 2.91万
• 依托单位: Japan Atomic Energy Agency
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2007
• 资助国家: 日本
• 起止时间: 2007 至 2009
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19560030/
• 关键词: 分子線エピタキシー; コヒーレントX線; その場測定; 結晶成長; 放射線、X線、粒子線; MBE、エピタキシャル

Dynamics of molecular beam epitaxy has been investigated by X-ray photon correlation spectroscopy. Experiments were performed at the BL11XU synchrotron beamline at SPring-8 using a X-ray diffractometer integrated with a molecular-beam epitaxy chamber. The reflected X-rays were measured with a charge-coupled device camera while compound semiconductors were being grown. Through the temporal changes of speckle patterns characteristic of coherent diffraction, evolution of the surface structures during crystal growth was successfully observed.

用X射线光子相关谱研究了分子束外延的动力学。实验是在BL11XU同步加速器光束线上进行的，使用的是与分子束外延室集成的X射线衍射仪。在生长化合物半导体时，用电荷耦合器件相机测量了反射的X射线。通过相干衍射散斑随时间的变化，成功地观察到了晶体生长过程中表面结构的演变。