X-Ray Photon Correlation Spectroscopy Study of Crystal Growth Dynamics

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Dynamics of molecular beam epitaxy has been investigated by X-ray photon correlation spectroscopy. Experiments were performed at the BL11XU synchrotron beamline at SPring-8 using a X-ray diffractometer integrated with a molecular-beam epitaxy chamber. The reflected X-rays were measured with a charge-coupled device camera while compound semiconductors were being grown. Through the temporal changes of speckle patterns characteristic of coherent diffraction, evolution of the surface structures during crystal growth was successfully observed.