An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications

该项目的目标是利用“选择性气液固（VLS）生长”技术和三维微加工工艺，开发集成非常精细的面外硅微探针、二氧化硅微管射线和微电子技术的技术。项目期间的主要研究成果包括：集成微尺度直径探针电极和管阵列，用于同时进行高空间分辨率的电记录、刺激和给药系统；实现不同长度的微探针，用于神经元组织中神经元的三维记录/刺激；以及iii)用于高性能电子器件的片上CMOS接口电路，包括记录神经信号的放大和滤波，以及数据/电力无线传输系统。从这些成就来看，所提出的设备可以成为一种强大的技术来帮助理解神经系统，并在医学应用中提供神经记录/刺激和药物传递。

The goal of this project is to developtechnologies for integration of very fine out-of-plane silicon microprobe, silicon-dioxide microtubearrays with microelectronics using a “selective vapor-liquid-solid (VLS)growth”techniqueand three-dimensional microfabrication processes. Major achievements of the researchduring the project period includei) integration of microscalediameter probe electrode and tube arrays for simultaneous electrical recording, stimulation, and drug delivery system with a high spatialresolution, ii) realization of the microprobes with various lengths for three-dimensional recording/stimulationof neurons in a neuronal tissue, and iii) on-chip CMOS interface circuitry for high performanceelectronics includingamplifications and filtering of recorded neural signals, and data/power wireless transmission system. From these achievements,theproposed devicecould become apowerful technique to assist inunderstanding nervous systems and offerneural recording/stimulation and drug delivery in medical applications.