An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications

该项目的目标是开发超细平面外硅微探针、二氧化硅微管射线与微电子技术的集成技术，使用“选择性气-液-固(VLS)生长”技术和三维微制造工艺。项目期间的主要研究成果包括：1)集成了用于高空间分辨率同时电记录、刺激和药物输送系统的微米级直径探针电极和管阵列；2)实现了用于神经元组织神经元三维记录/刺激的不同长度的微探针；3)用于高性能电子学的片上CMOS接口电路，包括记录的神经信号的放大和滤波；以及数据/功率无线传输系统。从这些成果来看，所提出的装置可能成为一种辅助了解神经系统和在医学应用中提供神经记录/刺激和药物输送的有效技术。

The goal of this project is to developtechnologies for integration of very fine out-of-plane silicon microprobe, silicon-dioxide microtubearrays with microelectronics using a “selective vapor-liquid-solid (VLS)growth”techniqueand three-dimensional microfabrication processes. Major achievements of the researchduring the project period includei) integration of microscalediameter probe electrode and tube arrays for simultaneous electrical recording, stimulation, and drug delivery system with a high spatialresolution, ii) realization of the microprobes with various lengths for three-dimensional recording/stimulationof neurons in a neuronal tissue, and iii) on-chip CMOS interface circuitry for high performanceelectronics includingamplifications and filtering of recorded neural signals, and data/power wireless transmission system. From these achievements,theproposed devicecould become apowerful technique to assist inunderstanding nervous systems and offerneural recording/stimulation and drug delivery in medical applications.