SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT

集成电路上选择性生长硅微探针电极阵列的智能微芯片

• 批准号: 14205044
• 负责人: ISHIDA Makoto
• 金额: $ 31.03万
• 依托单位: Toyohashi University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14205044/
• 关键词: Smart chip; Microprobe electrode; Single crystalline silicon probe array; Vapor-liquid-solid growth; Analysis of neurons; Retina, neuroscience; MOSFET on Si(111); Micro-Nano technology; 細胞電立計測; 単結晶シリコンプローブレイ; 網膜,脳科学

Study of nervous system by highly complex structures is a key problem in modern neuroscience. Understanding of nervous systems involves analysis of the great number of neurons in the tissue. Here we proposed a new electrode device, which is a high-density penetrating silicon (Si) microprobe electrode array, each with diameter similar to neuron, by selective Si growth using catalytic-gold (Au) and disilane (Si_2H_6) gas source. Diameter, position, and length of the Si probes were controlled. The diameter and density were reduced by 1/10, respectively, compared with previous microelectrodes. Low conductance of the probes was realized, and the mechanical strength of the probe was enough to withstand the neural penetration. In addition, the Si microprobes were fabricated on integrated circuits (IC), improving the performance of the electrode device. We also show the first neural recording demonstrated with a retina of carp (Cyrpinus carpio). Consequently, the Si probes recorded neural signals in the retina. In neuroscience, the Si microprobe array chip becomes an effective technique to provide accurate information from the neurons and allow understanding the mechanism of nervous system.

用高度复杂的结构研究神经系统是现代神经科学的一个关键问题。对神经系统的理解包括对组织中大量神经元的分析。本文提出了一种新的电极装置，即用催化金（Au）和乙硅烷（Si_2H_6）气体源选择性生长一个直径与神经元相似的高密度穿透硅（Si）微探针电极阵列。控制Si探针的直径、位置和长度。与以前的微电极相比，直径和密度分别减小了1/10。实现了探针的低电导，并且探针的机械强度足以承受神经穿透。此外，硅微探针制作在集成电路（IC）上，提高了电极器件的性能。我们还展示了第一个神经记录证明与视网膜的鲤鱼（鲤鱼）。因此，Si探针记录视网膜中的神经信号。在神经科学中，硅微探针阵列芯片成为一种有效的技术，以提供准确的神经元信息，并允许了解神经系统的机制。

项目成果

マルチチャンネルSiマイクロプローブ電極アレイチップ

多通道硅微探针电极阵列芯片

• 发表时间: 2004
• 期刊: 第43回エム・イー学会大会
• 作者: 石田 誠;河野剛士;高尾英邦;澤田 和明
• 通讯作者: 澤田 和明

Smart microchip for detecting cell potential using Si micro-probes selectively grown on IC chips

使用选择性生长在 IC 芯片上的硅微探针来检测细胞电位的智能微芯片

• 发表时间: 2003
• 期刊: Second International Conference on Molecular Electronics and Bioelectronics (M&BE2) (Invited)
• 作者: Makoto Ishida;Takeshi Kawano;Hdekuni Takao;Kazuaki Sawada
• 通讯作者: Kazuaki Sawada

Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method

气液固生长法制备用于神经活动记录的不同长度微硅探针阵列

• 发表时间: 2003
• 期刊: The Japan Society of Applied Physics (The 50th Spring meeting) No.3
• 作者: Ryoji Tani;Takeshi Kawano;Hiroshi Ishino;Hidekuni Takao;Kazuaki Sawada;Makoto Ishida
• 通讯作者: Makoto Ishida

Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording

用于神经活动记录的多通道 5 x 5 点 3 维硅微探针电极阵列

• 发表时间: 2003
• 期刊: Japanese Journal of Applied Physics Vol.42,Part.1,No.4B
• 作者: Takeshi Kawano;Hidekuni Takao;Kazuaki Sawada;Makoto Ishida
• 通讯作者: Makoto Ishida

Neural Recording Chip with Penetrating Si Microprobe Array and Application to record Response from Cell in Retina

具有穿透式硅微探针阵列的神经记录芯片及其用于记录视网膜细胞反应的应用

• 发表时间: 2003
• 期刊: The 20th Sensor Symposium on the IEEJ
• 作者: Takeshi Kawano;Yoshiko Kato;Ryoji Tani;Hiroshi Ishino;Hidekuni Takao;Kazuaki Sawada;Makoto Ishida
• 通讯作者: Makoto Ishida