Study of a novel field emitter with a built-in electrostatic lens.

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We have proposed a novel field emitter with a built-in electrostatic lens. This field emitter is fabricated by the etch-back method. The focusing electrode is located around the extraction gate electrode and its height is easily controlled. We have fabricated the field emitter whose focusing electrode is located below the extraction gate electrode. Such the field emitter has an excellent focusing characteristic without significant decrease of the emission current, even under the strong focusing condition. The electron beam emitted from the developed field emitter shows good symmetry.