Development of a novel micro-column using the multi-gated field emitter for SEM application

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We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.