Development of focused charged-particle beam optics based on charge-up of insulator capillaries

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We have developed a method to provide micro- or nano-meter sized quantum beams. The method employs tapered glass capillaries whose length is several cm and outlet diameter is of the order from sub-micron to 100 micron to realize the focusing on the irradiated samples. For keV-energy highly charged ion beams, the intensity of the extracted microbeam of several 1,000 cps has been achieved. For MeV-energy beams, some biological living targets such as HeLa cells, Escherichia coli, and Medaka embryos have been irradiated with the glass capillaries as a unique tool for micron order modification.