Development of High Response Shape Memory Alloy Micro-Actuator Material

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In order to improve the response speed of Ti-Ni shape memory alloy micro-actuator, we have investigated the mechanical properties of Ti-Ni-X ternary alloy thin films prepared by sputtering. It is confirmed that the 15at% addition of Cu into Ti-Ni alloy is effective to increase their critical stress against plastic deformation and to have a faster actuator response. Furthermore, the diaphragm type micro-actuator using this material showed an actuation response to a pulse current of more than 200Hz.