Formation of high performance hydrophilic titanium oxide thin films

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We have investigated the photo-induced activities of titanium dioxide thin films obtained by reactive RF magnetron sputtering under various growth conditions. The growth pressure during the film deposition affected the photo-induced hydrophilic/catalytic activity. We showed that the photocurrent under ultraviolet light illumination well corresponded to the photo-induced activity of the films. It is suggested that the band bending near the surface is one of the most crucial factors determines the activity of photo-induced behavior of the titanium dioxide thin films.