Formation of band-offset type transparent conductive oxide thin films

点击翻译按钮获取中文摘要

The band structure of modulation-doped zinc oxide multilayer films was investigated using Kelvin force microscopy (KFM).A cross sectional cleaved surface and an oblique section formed by an ion beam etching of the multilayer films were scanned by a KFM probe tip and the mapping of work function was obtained. The results predicted the optimum thickness of the non-doped zinc oxide layer for good electrical properties. Thus, KFM should be useful for optimizing the structural design of modulation-doped transparent conductive oxide films.