Multicomponent oxide phosphor thin films for TFEL devices prepared by using combinatorial magnetron sputtering

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Multicolor-emitting Bi-and RE-co-doped (Y_2O_3)x^- (GeO_2)_<1-x>、(Y_2O_3)_x^- (Gd_2O_3)_<1-x> and (Y_2O_3)_x^- (Ga_2O_3)_<1-x> multi-component oxide phosphor thin films were newly developed by optimizing the composition using a combinatorial rf-magnetron sputtering deposition method. High PL intensity and luminance in multi-color emission were obtained in a postannealed Bi-and RE-co-doped (Y_2O_3)x^- (GeO_2)_<1-x>、(Y_2O_3)_x^- (Gd_2O_3)_<1-x> and (Y_2O_3)_x^- (Ga_2O_3)_<1-x> phosphor thin films and TFEL devices fabricated using postannealed these phosphor thin films.