A study and development on MQW strain control MEMS for wavelength tunable laser

点击翻译按钮获取中文摘要

In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.