A study and development on MQW strain control MEMS for wavelength tunable laser

在本研究中，我们将微机电系统（MEMS）引入传统的化合物半导体激光器结构。首先，我们提出并制作了梳状驱动器的MEMS光栅结构，但波长偏移的估计是相当小的。因此，为了利用MEMS技术对多量子阱结构施加外力，我们发展了表面活性键合技术，并成功地将化合物半导体芯片键合到硅上。我们还测量了从硅到MQW的电流注入的光发射。

In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.