Study on fabrication technology of photonic crystals composed of visible-light emitting tantalum-oxide thin films

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Er-doped TaOx films were prepared by using rf magnetron sputtering. Visible light emission was observed from the films after annealing under excitation with a He-Cd laser (λ=325nm). Two peaks having wavelengths around 550 nm and 670 nm were observed from the films annealed at 800-1100oC. The strongest intensity of the 550-nm (green) peak was obtained from the film with 0.96 mol% of Er concentration after annealing at 900oC for 20 min. Such sputtered films which emit visible light can be useful as high-index materials for novel active devices using autocloned photonic crystals.