Study on the development of position sensor for ultra precision control

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In this research, ultra precision position sensors for manufacturing of electric and mechanical devices and controlling of atoms and molecules were proposed. These sensors based on the diffraction phenomenon have simple configuration and high repetition accuracy. Automatic alignment sensor and automatic position sensor were developed. Multi-axis automatic sensing and control for 2 axes position senor and angle sensor were realized. The positioning accuracies of the standard deviations 0.07nm (X-axis) and 0.23nm (Y-axis) are estimated.