Development of Micro/Nanoscale Thermofluid Multiple Sensing and Interface-Controlled Device

本论文的研究工作主要是发展微/纳米尺度的热流体多重感测技术，以将微/纳米技术的元素整合到界面控制的装置中。基于（i）具有高透气性的聚合物、（ii）聚合物的低温超精密加工和（iii）微接触印刷的发展，提出了可以控制不同相之间的界面处/附近的热流体现象的新型装置。利用共焦扫描仪的微PIV/LIF和倏逝波照明的纳米PIV/LIF分别获得了速度和标量的空间和时间分布以及zeta电位。新的传感技术被应用到拟议的设备的调查的气体溶解和渗透性的不同相之间的界面，界面静电势的形成机制和纳米级粗糙度的固体表面上的电渗流的影响。

This research work focused on the development of micro/nanoscale thermofluid multiple sensing techniques in order to integrate the element of micro/nano-technologies into interface-controlled devices. The novel devices, which can control thermofluid phenomena at/near interface between different phases, were proposed based upon the development of (i) polymers that has high gas permeability, (ii) cryogenic ultra precision machining of polymers and (iii) micro contact printing. Spatial and temporal distributions of velocity and scalar quantities, and zeta-potential were obtained by micro-PIV/LIF using a confocal scanner and nano-PIV/LIF using evanescent wave illumination, respectively. The new sensing techniques were applied to the proposed devices for the investigations of gas dissolution and permeability by the interface between different phases, formation mechanism of interfacial electrostatic potential and an influence of nanoscale roughness of solid surface on electroosmotic flow.